Surface acoustic wave (SAW) based sensors for applications to gaseous environments have been widely investigated since the last 1970s. More recently, the SAW-based sensors focus has shifted towards liquid-phase sensing applications: the SAW sensor contacts directly the solution to be tested and can be utilized for characterizing physical and chemical properties of liquids, as well as for biochemical sensor applications. The design of liquid phase sensors requires the selection of several parameters, such as the acoustic wave polarizations (i.e., elliptical, longitudinal and shear horizontal), the wave-guiding medium composition (i.e., homogeneous or non-homogeneous half-spaces, finite thickness plates or composite suspended membranes), the substrate material type and its crystallographic orientation. The paper provides an overview of different types of SAW sensors suitable for application to liquid environments, and intents to direct the attention of the designers to combinations of materials, waves nature and electrode structures that affect the sensor performances.
ORCID iDsC Caliendo https://orcid.org/0000-0002-8363-2972 M Hamidullah https://orcid.org/0000-0003-2131-4335
The evolution of microelectronic technologies is giving constant impulse to advanced micro-scaled systems which perform complex operations. In fact, the actual micro and nano Electro-Mechanical Systems (MEMS/NEMS) easily integrate information-gathering and decision-making electronics together with all sorts of sensors and actuators. Mechanical manipulation can be obtained through microactuators, taking advantage of magnetostrictive, thermal, piezoelectric or electrostatic forces. Electrostatic actuation, more precisely the comb-drive approach, is often employed due to its high versatility and low power consumption. Moreover, the device design and fabrication process flow can be simplified by compliant mechanisms, avoiding complex elements and unorthodox materials. A nano-scaled rotary comb drive is herein introduced and obtained using NEMS technology, with an innovative design which takes advantages of the compliant mechanism characteristics. A theoretical and numerical study is also introduced to inspect the electro-mechanical behavior of the device and to describe a new technological procedure for its fabrication.
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