2011
DOI: 10.1016/j.vacuum.2011.04.016
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Structural and optical properties of yttrium trioxide thin films prepared by RF magnetron sputtering

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Cited by 19 publications
(8 citation statements)
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“…The best correlation between the experimental and calculated Ψ(λ), Δ(λ) curves (1) in Figure 7 is achieved at the best optical dispersion of Y x Si y O z interfacial oxide, as represented by curve (2) in Figure 8. The drastic difference, however, is evident between experimental points and Ψ(λ), Δ(λ) curves (2) in Figure 7 54 The dispersion is very strong over the spectral range of 200−500 nm and is practically absent at longer wavelengths. The results are not at all in correlation with the available dispersion properties of the Y 2 O 3 bulk.…”
Section: Resultsmentioning
confidence: 90%
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“…The best correlation between the experimental and calculated Ψ(λ), Δ(λ) curves (1) in Figure 7 is achieved at the best optical dispersion of Y x Si y O z interfacial oxide, as represented by curve (2) in Figure 8. The drastic difference, however, is evident between experimental points and Ψ(λ), Δ(λ) curves (2) in Figure 7 54 The dispersion is very strong over the spectral range of 200−500 nm and is practically absent at longer wavelengths. The results are not at all in correlation with the available dispersion properties of the Y 2 O 3 bulk.…”
Section: Resultsmentioning
confidence: 90%
“…Several optical models were tested for the Y 2 O 3 /Si layered system in the literature. The multilayer stack of (surface roughened Y 2 O 3 layer)–(Y 2 O 3 bulk layer)–(SiO 2 interface layer)–(Si substrate) was proposed in ref . However, a very strange refractive index dispersion has been found for the Y 2 O 3 oxide formed by Y 2 O 3 target sputtering in the (Ar + O 2 ) mixture .…”
Section: Resultsmentioning
confidence: 99%
“…In Fig. 4(a), the splitted spectrums is composed by two peaks locating at 156.7 and 158.8 eV bonding energy, which are corresponding to the standard peak position of Y3d 5/2 and Y3d 3/2 [12,13] and in Fig. 4(b), the splitted spectrums is locating at 528.8 eV and 531.5 eV bonding energy, which are corresponding to the standard peak position of O1s 3/2 and O1s 1/2 [12] related to Y-O bonding in Y 2 O 3 film.…”
Section: Methodsmentioning
confidence: 99%
“…Recently, in order to solve these two challenges, coating a protective and antireflective film on ZnS was commonly adopted by researchers; several materials were commonly chosen as protective and antireflective systems such as oxide [9], fluoride [10] and phosphide [11]. Among oxide, Y 2 O 3 and SiO 2 have attracted much attention from science community as their well environmental durability and high infrared transmittance [12][13][14].…”
Section: Introductionmentioning
confidence: 99%
“…It is a ceramic material that is of great industrial and technological utility [19][20][21]. Yttria is an ideal candidate for the interface material for W f /W composites due to its good thermal and chemical stability [22,23]. Additionally, it shows low activation after neutron irradiation, which is particularly important for a fusion reactor [24].…”
Section: Introductionmentioning
confidence: 99%