Structural and mechanical properties of amorphous AlMgB14 thin films deposited by DC magnetron sputtering on Si, Al2O3 and MgO substrates

Abstract

AlMgB 14 coatings have been deposited by DC magnetron sputtering from elemental targets on Si (001), Al 2 O 3 (0001) and MgO (001) substrates at temperatures in the range of 25-350 °C. The structural and mechanical properties of AlMgB 14 films were characterized by X-ray diffraction, scanning electron microscopy, nanoindentation, and analyzed as a function of deposition conditions and substrate materials. The results show that all films are X-ray amorphous, and the mechanical properties of the deposited films depend on the substrate and growth temperature. AlMgB 14 thin films deposited at 350 °C are found to have smoother surfaces and containing more well-formed B 12 icosahedra than the films deposited at lower temperature, which consequently increase the hardness of the deposited films. The maximum hardness and Young's modulus of the as-deposited films are about 32.3 GPa and 310 GPa, respectively, for films deposited on Al 2 O 3 substrate at 350 °C.

An investigation on the mechanical properties of soft magnetostrictive FeCoCr films by nanoindentation

“…Numerous studies have been undertaken in investigating the mechanical properties of a wide range of materials from bulk to amorphous thin films [9], [10]. The mechanical properties of bulk materials are generally measured using the standard tensile and bend test [11], while for thin films in the nanoscale range, the hardness, elastic modulus, and elastic recovery are typically extracted using nanoindentation where loads are measured as a function of penetration depth [12], [13].…”

Structure and Frictional Properties of Ultrahard AlMgB14 Thin Coatings

“…AlMgB 14 -based materials are prepared by sintering, self-propagating high-temperature synthesis (SHS), hot pressing, and spark plasma sintering [ 10 , 11 , 12 ]. AlMgB 14 -based coatings can be obtained using physical vapor deposition [ 13 , 14 , 15 , 16 ]. Both targets consist of pre-synthesized powder materials [ 13 ] and stoichiometric elemental powder compositions [ 14 ], or separate elemental targets [ 15 , 16 ] can be used to obtain AlMgB 14 -based coatings.…”

“…AlMgB 14 -based coatings can be obtained using physical vapor deposition [ 13 , 14 , 15 , 16 ]. Both targets consist of pre-synthesized powder materials [ 13 ] and stoichiometric elemental powder compositions [ 14 ], or separate elemental targets [ 15 , 16 ] can be used to obtain AlMgB 14 -based coatings. For example, in [ 15 ], the DC magnetron sputtering method was used to obtain coatings using three Al-, Mg-, and B-based targets.…”

“…Both targets consist of pre-synthesized powder materials [ 13 ] and stoichiometric elemental powder compositions [ 14 ], or separate elemental targets [ 15 , 16 ] can be used to obtain AlMgB 14 -based coatings. For example, in [ 15 ], the DC magnetron sputtering method was used to obtain coatings using three Al-, Mg-, and B-based targets. Sputtering of the AlMgB 14 -based coating using separate elemental targets is a complicated technological process, as it requires fine experimental tuning of deposition technological modes to control the ratio of the sputtered elements on the substrate surface.…”

Synthesis and Characterization of Cu2ZnSnS4 Thin Films Obtained by Combined Magnetron Sputtering and Pulsed Laser Deposition

“…Magnetron sputtering is known as a physical technique for the synthesis of highly uniform thin films on large-area substrates [ 15 ]. In the MS technique, different parameters (pressure, power, deposition time, etc.)…”