2020
DOI: 10.1016/j.surfcoat.2020.125941
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Structural and mechanical properties of AlTiTaZr( N) medium entropy films (MEF) obtained by DC magnetron sputtering in dynamic mode

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Cited by 15 publications
(3 citation statements)
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“…The formation of nitride solid-solution could be attributed to the high entropy effect, which by increasing solubility, limits the formation of intermetallic phases between nitrogen and metallic elements [9]. Similar nitride phases were found in other HEN coatings [8,9,14]. Besides the main phase, some small peaks of fcc phases with slightly different lattice parameters are also present.…”
Section: Crystallographic Structurementioning
confidence: 60%
See 1 more Smart Citation
“…The formation of nitride solid-solution could be attributed to the high entropy effect, which by increasing solubility, limits the formation of intermetallic phases between nitrogen and metallic elements [9]. Similar nitride phases were found in other HEN coatings [8,9,14]. Besides the main phase, some small peaks of fcc phases with slightly different lattice parameters are also present.…”
Section: Crystallographic Structurementioning
confidence: 60%
“…Nevertheless, it is decreasing with increasing nitrogen flow. It can be a result of more severe partial poisoning of the targets [14].…”
Section: Figure 2 Sem Images Of the Cross Section Of Coatings Deposit...mentioning
confidence: 99%
“…15 It was speculated that HEANs containing the abovementioned elements would have good optical and thermodynamic properties. HEANs with superior thermal stability, such as (AlCrTaTiZrRu)N 0.7 , 31 AlTiTaZrN, 32 and VCrNb MoZrN, 33 have been extensively reported by many researchers. These studies demonstrated that HEANs can endure thermal treatment at 800 °C without considerable changes in the phase structures.…”
Section: Introductionmentioning
confidence: 99%