Structural and electrical properties of LiCoO2 thin-film cathodes deposited on planar and trench structures by liquid-delivery metalorganic chemical vapour deposition

High Energy Density All‐Solid‐State Batteries: A Challenging Concept Towards 3D Integration

“…[19,21] Moreover, deposition of conformal layers in 3D etched structures is currently also emerging as a standard process. [18,19,22,23] Therefore, this contribution will focus on other aspects such as potential diffusion barrier layers and high energy-density anode intercalation materials. Promising new results of planar Li-diffusion barrier layer materials will be discussed.…”

Texture effect on the electrochemical properties of LiCoO2 thin films prepared by PLD

“…This structure provides a 2D accessible path for Li diffusion, which results in good rate capability and is suitable for high power applications. Therefore LiCoO 2 thin films have been extensively studied recently by various deposition techniques [4][5][6][7][8].…”

Room-temperature synthesis of crystallized LiCoO2 thin films by electrochemical technique

“…As the miniaturization of electronic devices progresses, the need to develop suitable micro-battery systems as power sources for the microelectronic devices increases, so the fabrication of the lithiated intercalation cathode films has been intensively investigated lately [9][10][11]. The original pioneering works on the preparation of LiCoO 2 films have been performed mainly by using sol-gel [12], RF magnetron sputtering [13,14], chemical vapor deposition [15], polymeric precursor method [16], pulsed laser deposition [17][18][19], template synthesis [20] and spray pyrolysis [21] etc. Unfortunately, these synthetic methods require/involve sophisticated equipment; which require enormous energy consumption, expensive precursors as well as post-synthesis heat treatments.…”