2017
DOI: 10.1007/s00339-017-1448-6
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Structural and electrical investigations of MBE-grown SiGe nanoislands

Abstract: SiGe nanoislands were grown by Molecular Beam Epitaxy (MBE) method on Si (100) substrates with comparative growth parameters such as annealing temperature, top Ge content and layer-by-layer annealing (LBLA). XRD and Raman data suggest that annealing temperature, top Ge content and layer-by-layer annealing (LBLA) can overall give a control not only over the amorphous content but also over yielding the strained Ge layer formation in addition to mostly Ge crystallites. Depending on the layer design and growth con… Show more

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Cited by 3 publications
(2 citation statements)
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References 41 publications
(45 reference statements)
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“…For homogenous coating, sample holder was rotated at 10 rpm. The MBE system was optimized before the deposition process so that the thickness of the deposition could be well controlled as also demonstrated in our previous study . In addition to the deposition thicknesses used in this study, various deposition thicknesses and different nanopit geometries could be tried, however, due to the volume restriction in our study this could not be possible.…”
Section: Elemental Analysis Using Eds Measurement and Si–ge Atomic Pementioning
confidence: 98%
“…For homogenous coating, sample holder was rotated at 10 rpm. The MBE system was optimized before the deposition process so that the thickness of the deposition could be well controlled as also demonstrated in our previous study . In addition to the deposition thicknesses used in this study, various deposition thicknesses and different nanopit geometries could be tried, however, due to the volume restriction in our study this could not be possible.…”
Section: Elemental Analysis Using Eds Measurement and Si–ge Atomic Pementioning
confidence: 98%
“…Immediately upon being noticed due to the device potential, this discovery ignited an explosion in investigation into the physics of quantum dots and a large number of groups became active embarking on a variety of research interests. The result was a long list of experimental [29][30][31][32][33][34][35][36][37][38] and theoretical [39][40][41][42][43][44][45][46][47][48] works dealing with elastic, thermal, electrical, magnetic, electronic, and optical phenomena, which motivated authors to envisage various solid-state devices. Early efforts had largely focused on the pairs of VSQD separated by thin barrierstermed quantum dot molecules (QDM) -because of their importance in realizing the short-distance quantum-state transfer, which is essential for the future quantum communication networks.…”
mentioning
confidence: 99%