Stress relaxation study of sputtered Platinum thin films at near room temperature using an ultrasensitive strain gauge

Qu, Yu Qiao; Melamud, R.; Chandorkar, Saurabh A.; Lee, Hyung Kyu; Kenny, Thomas W.

doi:10.1109/memsys.2010.5442445

Cited by 2 publications

(2 citation statements)

References 13 publications

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“…This mismatch in coefficients of linear thermal expansion can give strain in the metal layers. Both Au [69][70][71] and Pt [72][73][74] are used as strain-sensitive gauges, and thus are sensitive to strain-induced geometry changes due to thermal expansion.…”

Section: Metal Adhesionmentioning

confidence: 99%

Disposable DNA Amplification Chips with Integrated Low-Cost Heaters †

et al. 2020

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Fast point-of-use detection of, for example, early-stage zoonoses, e.g., Q-fever, bovine tuberculosis, or the Covid-19 coronavirus, is beneficial for both humans and animal husbandry as it can save lives and livestock. The latter prevents farmers from going bankrupt after a zoonoses outbreak. This paper describes the development of a fabrication process and the proof-of-principle of a disposable DNA amplification chip with an integrated heater. Based on the analysis of the milling process, metal adhesion studies, and COMSOL MultiPhysics heat transfer simulations, the first batch of chips has been fabricated and successful multiple displacement amplification reactions are performed inside these chips. This research is the first step towards the development of an early-stage zoonoses detection device. Tests with real zoonoses and DNA specific amplification reactions still need to be done.

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Section: Metal Adhesionmentioning

confidence: 99%

Disposable DNA Amplification Chips with Integrated Low-Cost Heaters †

et al. 2020

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“…Our group has focused on investigating energy loss mechanisms responsible for limiting the quality factor (Q) in microelectromechanical resonators, focusing on gas damping [14], TED [15], [16], anchor damping [32], [33] and Akhiezer damping [10], [17]. Gas damping is generally well-understood and can be accurately accounted for by models, depending on the complexity of the device and its packaging [4], [19]- [21]. TED has been carefully studied [6], [22]- [24], and accurate models exist in COMSOL Multiphysics Package [25], [28] when used with accurate temperature-dependent representations for all the relevant parameters.…”

Section: Introductionmentioning

confidence: 99%

Direct Detection of Anchor Damping in MEMS Tuning Fork Resonators

Rodriguez

Chandorkar

Glaze

et al. 2018

J. Microelectromech. Syst.

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This paper presents the use of our approach to comprehensive measurements of the quality factor ( Q) of 1-MHz microelectromechanical system (MEMS) tuning fork resonators. We examined the most important mechanisms that are believed to limit the quality factor in MEMS tuning fork resonators (i.e., gas damping, thermoelastic dissipation (TED), anchor damping, and Akhiezer damping), and we were able to quantitatively account for each mechanism and to eliminate several from consideration. We take advantage of the elimination of TED at ∼120 K, where the linear coefficient of thermal expansion (CTE) becomes 0. These observations enabled the first direct examination of the strength of anchor damping in megahertz tuning fork resonators, allowing the study of the effect of anchor design and other factors. In this megahertz frequency range, the wavelength of elastic waves far exceeds the dimensions of the die, so commonly used models cannot make predictions of anchor damping. Our results show that elastic energy can escape from the resonator through the anchor(s) and still be retained within the die. We find that anchor damping in these megahertz resonators is impacted more by die attach structures at the boundaries of the die than by the resonator anchor designs within the die.[2018-0038] Index Terms-Quality factor, cryogenic experiments, thermoelastic dissipation, coefficient of thermal expansion, anchor damping.

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Stress relaxation study of sputtered Platinum thin films at near room temperature using an ultrasensitive strain gauge

Cited by 2 publications

References 13 publications

Disposable DNA Amplification Chips with Integrated Low-Cost Heaters †

Disposable DNA Amplification Chips with Integrated Low-Cost Heaters †

Direct Detection of Anchor Damping in MEMS Tuning Fork Resonators

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