Stress-Caused Deflections of Asymmetrical Coated Single-Crystal Silicon Elements

Abstract

Long and narrow beams of single crystal silicon were made by surrounding them with trenches of different width followed by dry release etch. The beams were coated nonconformally during fabrication. Depending on the asymmetry of the films coated onto the beam sidewalls they tend to bend laterally. This deflection has been analyzed experimentally and by FEM-Simulations.