Abstract:Delamination failure of a low-k interlayer dielectric (ILD) layer of Cu/low-k multilayer interconnects during a thermal cycle test was investigated by mechanical stress simulation. A three-dimensional (3D) multilevel modeling method was used to analyze the stress that occurred in a fine-scale film stack in a large-scale package. The maximum stress occurred at the low-k/cap film interface that was located at the bottom surface of the low-k ILD layer. This maximum-stress interface coincides with the interface wh… Show more
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