“…All the diffraction peaks in the figure are from the (0003) The reason of such quality differences depends remarkably on the selection of substrates, and the method used, even though Bi 2 Se 3 film is deposited layer by layer through van der Waals epitaxy. 21 Substrates with less lattice mismatch, such as InP, 19 GaN, 22 and MgO, 23 tend to have less non-uniform strain during the growth. From the comparison we conclude that although the samples prepared by using our simple CVD system does not, on a statistical average, have the same crystalline quality as the samples grown by using sophisticated MBE system, the data does show comparable results with some MBE-grown samples, 20 and better structural quality than films grown using a similar method.…”