“…The Ge film on Si substrate produced by reduced pressure chemical vapor deposition (RPCVD) has the smallest full width at half maximum (FWHM) value of X-ray diffractometer (XRD) and root mean square (RMS) value of the atomic force microscope (AFM), which is currently the best Ge film epitaxial method [8,9]. Electron cyclotron resonance chemical vapor deposition (ECR-CVD) process temperature is the lowest, and its FWHM of XRD, at a very thin epitaxial thickness, has a lower value [10]. However, the explosive GeH 4 gas is injected as a reaction gas in the CVD system to fabricate Ge films.…”