Stitching interferometry using Computer-Generated Hologram (CGH) based on sub-aperture adjustment aberration of 2-D Chebyshev polynomial

Cylindrical surfaces widely used in high-energy laser systems can have nearly semi-meter-scale dimensions, and aperture angles can exceed R/3. State-of-the-art interferometric stitching test methods involve stitching only along the arc direction, and the reported dimensions of ∼50 × 50 mm2 are far smaller than those required in high-energy laser systems. To rectify this limitation, an interferometric stitching method for cylindrical surfaces with large apertures is proposed. Moreover, a subaperture stitching algorithm that can stitch along both the linear and arc directions is developed. An interferometric stitching workstation equipped with a six-axis motion stage and a series of computer-generated holograms is established, where cylindrical surfaces with R/# values as large as R/0.5 and apertures up to 700 mm can be tested based on the theoretical analysis. A convex cylindrical surface with a 350 × 380 mm2 aperture is tested to validate the proposed method’s feasibility in enlarging the testable aperture of cylindrical surfaces significantly from Ф50 mm to Ф700 mm, thereby promoting the application of large cylindrical surfaces in high-energy laser systems.

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Stitching method based on dual quaternion for cylindrical mirrors

Zhang

Hou

Yan

et al. 2022

Opt. Express

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In this study, a stitching method based on dual quaternion is proposed. The application of a dual quaternion in sub-aperture stitching interferometry is analyzed in detail, and a calculation method for sub-aperture stitching based on a dual quaternion is deduced. The experimental results demonstrate the accuracy of the stitching method proposed in this study (residuals of overlapping area approximately 0.22 nm RMS). Finally, the residual differences of 0.79 nm RMS between the figure errors are acquired with a stitching by parts algorithm based on the dual quaternion and long trace profiler (FSP at HEPS). The high-accuracy and high-efficiency stitching method proposed in this study will expand its application in the metrology and manufacture of long cylindrical mirrors.

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Stitching interferometry using Computer-Generated Hologram (CGH) based on sub-aperture adjustment aberration of 2-D Chebyshev polynomial

Cited by 6 publications

References 15 publications

Alignment aberrations compensation for near-cylinder surface stitching interferometry with near-null Computer-Generated Hologram based on Legendre-Fourier polynomials

Alignment aberrations compensation for near-cylinder surface stitching interferometry with near-null Computer-Generated Hologram based on Legendre-Fourier polynomials

Interferometric stitching method for testing cylindrical surfaces with large apertures

Stitching method based on dual quaternion for cylindrical mirrors

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