1999
DOI: 10.1063/1.369176
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Step structure of arsenic-terminated vicinal Ge (100)

Abstract: Germanium ͑100͒ crystals, 9°off-axis towards the ͓011͔ were exposed to 2.0 Torr of tertiarybutylarsine and 99.0 Torr of hydrogen at 650°C, then heated to between 450 and 600°C in vacuum or H 2. The resulting surfaces consist of narrow dimer-terminated terraces, with ͑1ϫ2͒ and ͑2ϫ1͒ domains, that are separated by steps between one and eight atomic layers in height. The distribution of ͑1ϫ2͒ and ͑2ϫ1͒ domains changes with temperature, exhibiting a pronounced maximum in the ͑1ϫ2͒ fraction at 510°C. These results … Show more

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Cited by 16 publications
(13 citation statements)
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“…For miscut orientations near (100) and (111), we find (100) and (111) terraces [1,2], in complete agreement with previously published results [3][4][5][6][7][8]. Prior to this study, little was known about the higher-angle miscuts, however.…”
Section: Introductionsupporting
confidence: 80%
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“…For miscut orientations near (100) and (111), we find (100) and (111) terraces [1,2], in complete agreement with previously published results [3][4][5][6][7][8]. Prior to this study, little was known about the higher-angle miscuts, however.…”
Section: Introductionsupporting
confidence: 80%
“…Our results for AsH 3 exposure are quite different than for PH 3 exposure. Most significantly, we find that AsH 3 etches Ge, whereas PH 3 does not [1].…”
Section: Introductioncontrasting
confidence: 53%
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