Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.01EX461) 2001
DOI: 10.1109/iitc.2001.930064
|View full text |Cite
|
Sign up to set email alerts
|

Step coverage and continuity of an I-PVD Ta(N) barrier layer: limitations

Zs. Tőkei
1
,
David McInerney
2
,
Mikhaı̈l R. Baklanov
3
et al.
Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Year Published

2002
2002
2004
2004

Publication Types

Select...
2

Relationship

1
1

Authors

Journals

citations
Cited by 2 publications
references
References 1 publication
0
0
0
Order By: Relevance

Evaluation of Ta and TaN-based Cu diffusion barriers deposited by Advanced Hi-Fill (AHF) sputtering onto blanket wafers and high aspect ratio structures

Burgess
1
,
Donohue
2
,
Buchanan
3
et al. 2002
Microelectronic Engineering
13
0
6
0
View full textAdd to dashboardCite

Evaluation of Ta and TaN-based Cu diffusion barriers deposited by Advanced Hi-Fill (AHF) sputtering onto blanket wafers and high aspect ratio structures

Burgess
1
,
Donohue
2
,
Buchanan
3
et al. 2002
Microelectronic Engineering
13
0
6
0
View full textAdd to dashboardCite

Fabrication of 100 nm pitch copper interconnects by electron beam lithography

Wu
1
,
Jonckheere
2
,
Tőkei
3
et al. 2004
Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Self Cite
8
0
6
0
View full textAdd to dashboardCite
show abstract
scite logo

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

Product
Browser ExtensionAssistant by sciteCitation Statement SearchReference CheckVisualizationsDashboardsExplore JournalsExplore OrganizationsExplore FundersEmbedding BadgeEmbedding Citation SearchPricing
Resources
BlogHelp & FAQAccessibility StatementAPI TermsFor Universities & GovernmentsFor ResearchersFor PublishersFor Corporate, Pharma & EnterpriseAuthor MarketingBecome an AffiliateGet an organization trial or quotescite Data & Services
About
News & PressCareersRead our PaperCoverage

BlogTerms and ConditionsAPI TermsPrivacy PolicyContactCookie PreferencesDo Not Sell or Share My Personal Information

Copyright © 2024 scite LLC. All rights reserved.

Made with 💙 for researchers

Part of the Research Solutions Family.