Statistical and Experimental Analysis of Correlated Time-Varying Process Variables for Conditions Diagnosis in Chemical–Mechanical Planarization

Zhang, Xi; Wang, Hui; Huang, Qiang; Kumar, Ashok; Zhai, Jingmei

doi:10.1109/tsm.2009.2028212

Cited by 5 publications

(4 citation statements)

References 20 publications

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“…where E is Young's modulus, I is the moment of inertia of area, l is the fiber length, δ is the y direction displacement, μ is the coefficient of friction, and F is the contact pressure on the pad. Usually the coefficient of friction μ is time variable, 20 but in this model it is considered constant. From Equation 1, the m-th order buckling stress is given by,…”

Section: Features Of the Newly Developed Fiber Conditionermentioning

confidence: 99%

Development of Flexible Fiber Conditioner in Chemical Mechanical Planarization

Fujita

Doi

Arai

2019

ECS J. Solid State Sci. Technol.

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A flexible fiber pad conditioner, which conforms well to the pad surface, has been developed. Conventional disc-type conditioners have a potential concern of uniform conditioning across the entire pad surface in terms of intermittent contact by face-to-face contact. In the flexible fiber conditioner, each fiber tip functions independently with constant contact force on the pad, by utilizing the bending effect of the flexible fiber. Therefore, the conditioner performs uniform and fine conditioning, following the height variation in the pad surface. Uniform conditioning was verified by a unique method using surface coloration on a pad with height variation. In addition, it was shown that, using the developed conditioner, the chips generated by pad conditioning were very small, and the pad surface was finely scraped and roughened. It was further demonstrated that the developed flexible fiber conditioner shortened the pad break-in process. Moreover, compared with the conventional disk-type conditioner, the developed flexible fiber conditioner resulted in a uniform polishing profile even in the midst of the break-in process. The results indicate that it is important for the break-in of the polishing pad, to uniformly scrape and roughen the entire area of the pad while following the pad surface, rather than planarizing the surface.

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Section: Features Of the Newly Developed Fiber Conditionermentioning

confidence: 99%

Development of Flexible Fiber Conditioner in Chemical Mechanical Planarization

Fujita

Doi

Arai

2019

ECS J. Solid State Sci. Technol.

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“…Overlooking the potential autocorrelation can lead to with many sine and cosine terms which is hard to find physical interpretation. Therefore, we extend the model (2) by imposing a structure on residuals, (4) Compared with the previous model based on the assumption of noise independence, the noise term in the new model permits an autocorrelated structure, i.e., error terms at time and have correlation coefficients . For example, the error of the COF may follow a first-order autoregressive model…”

Section: A Extended Nonlinear Dynamic Model For Interaction Among Fpvsmentioning

confidence: 99%

“…Our experience suggested that certain process changes may not be easily detected without collectively studying these FPVs. Simultaneously analyzing these FPVs and their interaction patterns could bring additional insights into process condition changes and new opportunities for process improvement [3], [4].…”

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confidence: 99%

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Analysis of Interaction Structure Among Multiple Functional Process Variables for Process Control in Semiconductor Manufacturing

Zhang

Huang

2010

IEEE Trans. Semicond. Manufact.

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Abstract-Our previous work has shown that complex interaction patterns among functional process variables (FPVs) in semiconductor manufacturing processes can indicate process condition changes. We developed a nonlinear dynamics model to describe interactions among FPVs, which was further used to monitor process condition changes. However, the interaction structure among three or more FPVs has not been thoroughly investigated for the purpose of process control. In this work, we first extend our previously developed nonlinear dynamics model by considering the autocorrelation in each FPV. A generalized least square (GLS) method is applied to estimate the extended model. The interaction structure among FPVs is represented as a complex network in which the directionality and strength of interaction are discovered from the extended nonlinear dynamics model. To validate the proposed method, we first conduct simulation study using van del Pol oscillators. Then two sets of real experimental data from chemical mechanical planarization process are used to investigate the interaction structure change over a polishing cycle. The results show that the extracted patterns of interaction structure among FPVs aid to uncover the polishing mechanisms and provide more insights for condition monitoring and diagnosis.

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Notice of Retraction Failure mode identification using thermal data based on mixed effects model in chemical mechanical planarization process

Liu

Zhang

2013

2013 International Conference on Quality, Reliability, Risk, Maintenance, and Safety Engineering (QR2MSE)

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Statistical and Experimental Analysis of Correlated Time-Varying Process Variables for Conditions Diagnosis in Chemical–Mechanical Planarization

Cited by 5 publications

References 20 publications

Development of Flexible Fiber Conditioner in Chemical Mechanical Planarization

Development of Flexible Fiber Conditioner in Chemical Mechanical Planarization

Analysis of Interaction Structure Among Multiple Functional Process Variables for Process Control in Semiconductor Manufacturing

Notice of Retraction Failure mode identification using thermal data based on mixed effects model in chemical mechanical planarization process

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