1999
DOI: 10.1002/(sici)1098-2787(1999)18:1<48::aid-mas2>3.0.co;2-i
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Static secondary ion mass spectrometry (S-SIMS) Part 2: material science applications

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Cited by 76 publications
(46 citation statements)
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References 169 publications
(125 reference statements)
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“…Mass spectral libraries have become available recently [4,5] but contain only a selected range of inorganic compounds. The work on inorganic compounds with S-SIMS in dierent ®elds has been reviewed recently [6,7].…”
Section: Introductionmentioning
confidence: 99%
“…Mass spectral libraries have become available recently [4,5] but contain only a selected range of inorganic compounds. The work on inorganic compounds with S-SIMS in dierent ®elds has been reviewed recently [6,7].…”
Section: Introductionmentioning
confidence: 99%
“…It has three major effects: (1) mixing of the upper layers of the sample, resulting in an amorphization of the surface; (2) implantation of atoms from the primary ion beam into the sample, and (3) ejection of secondary particles (atoms and small molecules), i.e., sputtering. The latter effect is exploited in the powerful surface characterization technique SIMS [7][8][9].…”
Section: Surface Characterizationmentioning
confidence: 99%
“…Examples include particle detection, diagnostic surface characterization techniques such as secondary ion mass spectrometry (SIMS) [6][7][8][9], X-ray photon spectroscopy (XPS) [10], Auger electron spectroscopy (AES) [11,12] and surface fabrication (lithography and chemical vapor deposition) [13][14][15][16]. When not directly exploited, particlesurface interactions often cause artifacts to be acknowledged, understood, and, if possible, eliminated.…”
mentioning
confidence: 99%
“…The two basic approaches used for 3D-MS imaging are, first, depth profiling using an ionization source that ablates tissue and second, recording a sequence of 2D images from serial sections taken from a tissue volume and then combining this information. In the depth profiling experiments, ablation of the tissue material is used to expose lower layers of tissue for analysis; this has been achieved with high energy ion beams in secondary ion mass spectrometry (SIMS) imaging [29,33,35] or with lasers in methods that include matrix assisted laser desorption (MALDI) [5,36,37], laser ablation electrospray ionization (LAESI) [28,38], and laser ablation followed by atmospher-ic-pressure afterglow (LA-FAPA) [39]. In the alternative serial-sectioning approach, a volume of tissue is sliced into thin sections and each of the sections is imaged using standard 2D-MS imaging.…”
Section: Introductionmentioning
confidence: 99%