Key words Optical emission spectroscopy, microwave flowing afterglows, N2-H2, Ar-N2-H2, Ar-N2-O2 gas mixtures, N density, O density, N2 (A) density.Early afterglows of N 2-H2, Ar-N2-H2 and Ar-N2-O2 flowing microwave discharges are characterized by optical emission spectroscopy. The N and O atoms and the N2(A) metastable molecule densities are determined by optical emission spectroscopy after calibration by NO titration for N and O-atoms and measurements of NO and N2 band intensities. If an uncertainty of 30% is estimated on N-atomic density, an inaccuracy of one order of magnitude is obtained on the O and N2 (A) densities. In N2-(0.05-2.5%)H2 and Ar-(1-50%)N2-(0.05-2.5%) H2 gas mixtures, the O-atoms are coming from O2 impurities in the discharge. Concentrations of N and O-atoms and of N2 (A) densities are compared to the ones obtained in Ar-(5-50%)N2-(0.2-2.5%) O2 gas mixtures in which a controlled amount of O2 is added.