Key words Optical emission spectroscopy, N2-O2 HF flowing afterglows, N density, O density, N2 (A) metastable density. Early afterglows of N 2 and N2-O2 flowing microwave discharges are characterized by optical emission spectroscopy. The N and O atom and N2(A) metastable molecule densities are determined by optical emission spectroscopy after calibration by NO titration for N-atoms and measurements of NO and N2 band intensities for O-atoms and N2(A) metastable molecules. By using N2 tanks with 50 and 10 ppm impurity, it is determined in the afterglow an O-atom impurity of 150-200 ppm. Variations of the N and O-atom and N2(A) metastable molecule densities are obtained in the early afterglow of N 2 -(9·10 −5 -3·10 −3 )O 2 gas mixtures.
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