Standards for the Calibration of Instruments for Dimensional Nanometrology

Koenders, Ludger; Dziomba, Thorsten; Thomsen-Schmidt, Peter; Wilkening, G.

doi:10.1002/3527606661.ch18

Cited by 13 publications

(14 citation statements)

References 11 publications

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“…Where certied reference materials (CRM) do exist, they are generally for size characterisation in water or simple media (e.g. CRM from the IRMM or NIST 36 ), although more recently reference NMs for specic surface area or dimensional standards 37 were launched by BAM. 38 The other major category of "reference" materials are the OECD sponsored materials 39 that are representative of industry NMs; however there is no internal consistency in this materials library in terms of size, surface coating, synthesis route and thus impurities etc., making determination of the key property or combination of properties driving a specic toxicity response near impossible if based on this library.…”

Section: Introductionmentioning

confidence: 99%

Development of scalable and versatile nanomaterial libraries for nanosafety studies: polyvinylpyrrolidone (PVP) capped metal oxide nanoparticles

et al. 2017

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Section: Introductionmentioning

confidence: 99%

Development of scalable and versatile nanomaterial libraries for nanosafety studies: polyvinylpyrrolidone (PVP) capped metal oxide nanoparticles

et al. 2017

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“…In this case, periodical patterns are commonly used and the pitch, that is, the distance between two subsequent elements of the repeated nanostructures is used as a length standard. The uncertainty of the mean pitch could be of the order of a few tenths of a nanometer, as, in the determination of an instrument’s nonlinearity, an extremely high accuracy is needed. − No periodic structures are currently available as a lateral length standard with period below 50 nm but above typical lattice spacing in the range of 1 nm. Commercial standards in this range of length consist of a small chip containing a single isolated line 4 mm long.…”

Section: Introductionmentioning

confidence: 99%

Toward Lateral Length Standards at the Nanoscale Based on Diblock Copolymers

Aprile

Lupi

Fretto

et al. 2017

ACS Appl. Mater. Interfaces

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The self-assembly (SA) of diblock copolymers (DBCs) based on phase separation into different morphologies of small and high-density features is widely investigated as a patterning and nanofabrication technique. The integration of conventional top-down approaches with the bottom-up SA of DBCs enables the possibility to address the gap in nanostructured lateral length standards for nanometrology, consequently supporting miniaturization processes in device fabrication. On this topic, we studied the pattern characteristic dimensions (i.e., center-to-center distance L and diameter D) of a cylinder-forming polystyrene-b-poly( methyl methacrylate) PS-b-PMMA (54 kg mol, styrene fraction 70%) DBC when confined within periodic SiO trenches of different widths (W, ranging between 75 and 600 nm) and fixed length (l, 5.7 μm). The characteristic dimensions of the PMMA cylinder structure in the confined configurations were compared with those obtained on a flat surface (L = 27.8 ± 0.5 nm, D = 13.0 ± 1.0 nm). The analysis of D as a function of W evolution indicates that the eccentricity of the PMMA cylinders decreases as a result of the deformation of the cylinder in the direction perpendicular to the trenches. The center-to-center distance in the direction parallel to the long side of the trenches (L) is equal to L measured on the flat surface, whereas the one along the short side (L) is subjected to an appreciable variation (ΔL = 5 nm) depending on W. The possibility of finely tuning L maintaining constant L paves the way to the realization of a DBC-based transfer standard for lateral length calibration with periods in the critical range between 20 and 50 nm wherein no commercial transfer standards are available. A prototype transfer standard with cylindrical holes was used to calibrate the linear correction factor c(Δx') of an atomic force microscope for a scan length of Δx' = 1 μm. The relative standard uncertainty of the correction factor was only 1.3%, and the second-order nonlinear correction was found to be significant.

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“…The traceability of AFM calibration parameters, such as piezoelectric stage actuation and cantilever stiffness, to SI standards has been addressed in the literature [15][16][17]. However, an overall framework for analyzing uncertainties in a mechanical property measured using AFM, for example the nanoscale elastic modulus or work of adhesion, has not yet been explored.…”

Section: Introductionmentioning

confidence: 99%

Uncertainty quantification in nanomechanical measurements using the atomic force microscope

et al. 2011

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Quantifying uncertainty in measured properties of nanomaterials is a prerequisite for the manufacture of reliable nanoengineered materials and products. Yet, rigorous uncertainty quantification (UQ) is rarely applied for material property measurements with the atomic force microscope (AFM), a widely used instrument that can measure properties at nanometer scale resolution of both inorganic and biological surfaces and nanomaterials. We present a framework to ascribe uncertainty to local nanomechanical properties of any nanoparticle or surface measured with the AFM by taking into account the main uncertainty sources inherent in such measurements. We demonstrate the framework by quantifying uncertainty in AFM-based measurements of the transverse elastic modulus of cellulose nanocrystals (CNCs), an abundant, plant-derived nanomaterial whose mechanical properties are comparable to Kevlar fibers. For a single, isolated CNC the transverse elastic modulus was found to have a mean of 8.1 GPa and a 95% confidence interval of 2.7-20 GPa. A key result is that multiple replicates of force-distance curves do not sample the important sources of uncertainty, which are systematic in nature. The dominant source of uncertainty is the nondimensional photodiode sensitivity calibration rather than the cantilever stiffness or Z-piezo calibrations. The results underscore the great need for, and open a path towards, quantifying and minimizing uncertainty in AFM-based material property measurements of nanoparticles, nanostructured surfaces, thin films, polymers and biomaterials.

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Standards for the Calibration of Instruments for Dimensional Nanometrology

Cited by 13 publications

References 11 publications

Development of scalable and versatile nanomaterial libraries for nanosafety studies: polyvinylpyrrolidone (PVP) capped metal oxide nanoparticles

Development of scalable and versatile nanomaterial libraries for nanosafety studies: polyvinylpyrrolidone (PVP) capped metal oxide nanoparticles

Toward Lateral Length Standards at the Nanoscale Based on Diblock Copolymers

Uncertainty quantification in nanomechanical measurements using the atomic force microscope

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