Stability of molecular layer deposited zincone films: experimental and theoretical exploration

Abstract

Experimental and theoretical degradation study of MLD grown hybrid inorganic–organic zincone films.

Modeling Mechanism and Growth Reactions for New Nanofabrication Processes by Atomic Layer Deposition

“…In the MLD experiment of Choudhury et al [ 101 ] , a hybrid zincone fi lm [(HO)Zn(OPhOH)] n is deposited using ZnEt 2 and hydroquinone (HO-Ph-OH, Ph = phenyl). DFT is used to calculate the formation energy of several units of the zincone structure and to explain the stability of the MLD deposited hybrid thin fi lm.…”

Mesoporous ZnO thin films obtained from molecular layer deposited “zincones”

“…4,7,8 These materials possess unique properties, often differing from their pure organic and inorganic counterparts. 9,10 In the literature, several functional hybrid films have been reported, adopting different metallic precur-sors (e.g., Al, [11][12][13][14][15] Ti, 16,17 Zr, 16 Hf, 18 Zn, [19][20][21][22] 23,24 Li, 25 Fe, 26,27 Mo, 28 Sn, 29 and Er 30 ). Generally, the composition of the thin films includes the metallic element, oxygen and/or nitrogen, and an organic backbone, and they are referred to as 'metalcones', e.g., alucones, zincones, and titanicones.…”

On the transformation of “zincone”-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition

“…These materials possess properties in between their pure organic and inorganic counterparts, yet differing from the pristine materials [5–6]. In the literature, a wide array of hybrid films has been reported, adopting several metallic precursors (such as Al [7–10], Ti [11–12], Zr [11], Hf [13], Zn [14–17], V [18–19], Li [20], Fe [21–22], Mo [23] and Er [24]). Generally, the thin films comprise the metal element, oxygen, and an organic backbone, and are referred to as metal alkoxides or ‘metalcones’, e.g., alucones, zincones, and titanicones [2,4].…”