Sputtering and electron emission under mercury ion bombardment in the energy range 15-100 keV

Abstract

The sputtering ratios of stainless steel, tungsten and molybdenum under mercury ion bombardment have been measured for ion energies between 15 and 100 keV. The measurements were made using a 100 keV ion source and the sputtering ratio was determined by the weight loss method using an electrostatic balance. The results are compared with available data where this is possible.