Sputtered TiO2 thin films with NiO additives for hydrogen detection

Kosc, I.; Hotovy, I.; Řeháček, V.; Griesseler, R.; Predanocy, M.; Wilke, Marcus; Spieß, Lothar

doi:10.1016/j.apsusc.2012.09.061

Cited by 31 publications

(11 citation statements)

References 22 publications

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“…Concomitantly, besides the selectivity and operating temperature issues, the recent discovery of n-p-n type conductivity transition with gas exposure has triggered new matter to be addressed. Recently, many articles have reported on this transition behavior from n-to p-type conductivity or the opposite, for pure MOX, doped MOX and for its composites [4][5][6][7][8][9][10][11]. The explanation of conductivity transition is a matter of debate in recent times since the factors causing this phenomenon are manifold, such as temperature [4][5][6][7], gas concentration [4][5][6][7][8][9] composition [4,10], and impurity concentration [11,12].…”

Section: Introductionmentioning

confidence: 99%

Cost-effective fabrication of polycrystalline TiO2 with tunable n/p response for selective hydrogen monitoring

Haidry

Sun

Saruhan

et al. 2018

Sensors and Actuators B: Chemical

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In this report, we demonstrate a simple and cost-effective strategy to prepare polycrystalline rutile TiO2 based gas sensors with tunable n/p type conductivity inversion depending on gas concentration, operating temperature and applied voltage. The effect of surface modification by Ag and Ni thin film on structural, morphological and gas sensor characteristics is studied in detail. The sensors show excellent sensing performance in terms of sensitivity (~25% for 0.1 vol. % H2 diluted in technical air), selectivity (selectivity factor for 0.1 vol. % H2 is about ~24 against NH3, CH4, NO2 and ~8 for CO), stability (both long-term and short-term) and reaction times (~0.7 min for 0.1 vol. % H2). The aforementioned performance is recorded at 300 °C with applied voltage of 0.1 V. Excluding the power consumption of sensor heater-5 watt), this applied voltage 0.1 V can reduce the power-10 watt. We found a critical point, defined with threshold-concentration (CTh), threshold-temperature (TTh) and criticalvoltage (VC), at which the conductivity inverses from one kind to another, something intriguing to novel sensing phenomena that can be exploited to tailor the selectivity of the sensors. A physical-chemical sensing model is presented to understand the aforesaid peculiar occurrence.

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Section: Introductionmentioning

confidence: 99%

Cost-effective fabrication of polycrystalline TiO2 with tunable n/p response for selective hydrogen monitoring

Haidry

Sun

Saruhan

et al. 2018

Sensors and Actuators B: Chemical

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“…On the other hand, combining different MOX can lead to an enhancement of H 2 detection. In this context, many heterostructures have been used to detect H 2 and enhance the sensing characteristics, with composite structures such as Co 3 O 4 /WO 3 [ 139 ], Co 3 O 4 /SnO 2 [ 140 ], CuO/TiO 2 [ 141 ], CuO/Al 2 O 3 [ 142 ], NiO/TiO 2 [ 143 ], CuO/Al 2 O 3 [ 142 ], Pd/TiO 2 /CuO [ 144 ], NiO/Au [ 145 ], and NiO/Pd [ 146 ].…”

Section: Sensing Properties Of P-type Mox Thin Filmsmentioning

confidence: 99%

P-Type Metal Oxide Semiconductor Thin Films: Synthesis and Chemical Sensor Applications

Moumen

Kumarage

Comini

2022

Sensors

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This review focuses on the synthesis of p-type metal-oxide (p-type MOX) semiconductor thin films, such as CuO, NiO, Co3O4, and Cr2O3, used for chemical-sensing applications. P-type MOX thin films exhibit several advantages over n-type MOX, including a higher catalytic effect, low humidity dependence, and improved recovery speed. However, the sensing performance of CuO, NiO, Co3O4, and Cr2O3 thin films is strongly related to the intrinsic physicochemical properties of the material and the thickness of these MOX thin films. The latter is heavily dependent on synthesis techniques. Many techniques used for growing p-MOX thin films are reviewed herein. Physical vapor-deposition techniques (PVD), such as magnetron sputtering, thermal evaporation, thermal oxidation, and molecular-beam epitaxial (MBE) growth were investigated, along with chemical vapor deposition (CVD). Liquid-phase routes, including sol–gel-assisted dip-and-spin coating, spray pyrolysis, and electrodeposition, are also discussed. A review of each technique, as well as factors that affect the physicochemical properties of p-type MOX thin films, such as morphology, crystallinity, defects, and grain size, is presented. The sensing mechanism describing the surface reaction of gases with MOX is also discussed. The sensing characteristics of CuO, NiO, Co3O4, and Cr2O3 thin films, including their response, sensor kinetics, stability, selectivity, and repeatability are reviewed. Different chemical compounds, including reducing gases (such as volatile organic compounds (VOCs), H2, and NH3) and oxidizing gases, such as CO2, NO2, and O3, were analyzed. Bulk doping, surface decoration, and heterostructures are some of the strategies for improving the sensing capabilities of the suggested pristine p-type MOX thin films. Future trends to overcome the challenges of p-type MOX thin-film chemical sensors are also presented.

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“…TiO 2 and Fe doped TiO 2 thin films were deposited by different methods, such as sol-gel process [9], chemical spray pyrolysis [10,11], sputtering [12], hydrothermal technique [13], reactive pulsed laser deposition [14] and electron beam physical vapour deposition [15]. Among which spray pyrolysis offers a number of advantages over other deposition processes, such as scalability of the process, cost-effectiveness, easiness of doping, operation at moderate temperatures and large uniform surface area.…”

Section: Introductionmentioning

confidence: 99%

Enhanced ethanol sensing performance of Fe: TiO2 nanowires and their mechanism of sensing at room temperature

Vijayalakshmi¹,

Jereil²

2015

Ceramics International

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Sputtered TiO2 thin films with NiO additives for hydrogen detection

Cited by 31 publications

References 22 publications

Cost-effective fabrication of polycrystalline TiO2 with tunable n/p response for selective hydrogen monitoring

Cost-effective fabrication of polycrystalline TiO2 with tunable n/p response for selective hydrogen monitoring

P-Type Metal Oxide Semiconductor Thin Films: Synthesis and Chemical Sensor Applications

Enhanced ethanol sensing performance of Fe: TiO2 nanowires and their mechanism of sensing at room temperature

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