Spreading resistance correction formula more suited for the Gauss-Laguerre quadrature

Incorporation of a Resistivity‐Dependent Contact Radius in an Accurate Integration Algorithm for Spreading Resistance Calculations

“…Choo et al (13) solved this problem by splitting the integral into three pieces and using an adaptive Simpson rule for each of them. Using 150 integrand evaluations they obtain an accuracy better than 2% (14). However as pointed out in recent papers (6,14) the accuracy of the integration is extremely important in the conversion procedure.…”

“…However as pointed out in recent papers (6,14) the accuracy of the integration is extremely important in the conversion procedure. We have found that the inaccuracy should be less than 0.1% in order to calculate the resistivities with an inaccuracy of less than 1% (14).…”

“…It only guarantees that Eq. [1] is solved within 1% and that the calculated resistivities do not have an error, which may be quite large (14), simply due to the limited integration accuracy (6).…”

“…Two-probe spreading resistance measurements are widely used for determining doping profiles in semiconducts (1)(2)(3)(4). The conversion of the measured resistance profile to a resistivity profile has been the subject of a number of publications during the last decade (1,2,(5)(6)(7)(8)(9)(10)(11)(12)(13)(14)(15)(16). One conversion scheme which is very attractive with respect to snpeed and computation time is the local slope approximation proposed by Dickey (5).…”

Mathematical modeling of electric potential in semiconductors with heterogeneous dopant profile

“…The authors of the work describe [7] the technique of specific conductivity measurements for epitaxial and diffusional layers, which enable us to measure voltage at probe measurements using well-known laws describing impurity distribution with depth.…”