Spray pyrolysis deposition of nanostructured zirconia thin films

Peshev, P.; Stambolova, I.; Vassilev, Stanislav V.; Stefanov, P.; Blaskov, V.; Starbova, K.; Starbov, N.

doi:10.1016/s0921-5107(02)00394-x

Cited by 56 publications

(25 citation statements)

References 36 publications

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“…The investigations of chemical composition by XPS shows the presence of 3.5 and 5.6 at.% Si in pure TiO 2 films annealed at 500 and 600 • C, respectively. This could be explained by interaction of quartz substrate with the films similarly to the sprayed ZrO 2 films [21]. From these results, inclusion of the SiO 2 in TiO 2 films may stabilize the anatase phase.…”

Section: Sample Mol% Sno2mentioning

confidence: 77%

Thin nanocrystalline TiO2–SnO2 sprayed films: Influence of the dopant concentration, substrate and thermal treatment on the phase composition and crystallites sizes

Stambolova

Blaskov

Vassilev

et al. 2010

Journal of Alloys and Compounds

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Section: Sample Mol% Sno2mentioning

confidence: 77%

Thin nanocrystalline TiO2–SnO2 sprayed films: Influence of the dopant concentration, substrate and thermal treatment on the phase composition and crystallites sizes

Stambolova

Blaskov

Vassilev

et al. 2010

Journal of Alloys and Compounds

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“…More than one method has been used to synthesize ZrO 2 films [12,13], among them are: sol-gel, atomic layer deposition, solid state reaction and spray pyrolysis [14][15][16]. The ultrasonic spray pyrolysis has been successfully used to deposit different metal oxide films [17,18]. This is a low cost technique with high deposition rates, easy to operate and with the capability to carry out depositions on large areas.…”

Section: Introductionmentioning

confidence: 99%

Multicolored photoluminescence and structural properties of zirconium oxide films co-doped with Tb3+ and Eu3+ ions

Ramos-Guerra

Guzmán‐Mendoza

Garcı́a-Hipólito

et al. 2015

Ceramics International

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“…The preferable precursor are zirconium hydroxyl acetate (ZHA), inorganic Zirconium tetra chlorate (ZrCl 4 ), Zr(NO 3 ) 4 ,and metalloorgaic Zirconium acetylacetonate(Zr(C 5 H 7 O 2 ) 4 , and Zr-tetrabut oxide(Zr[OC(CH 3 ) 3 ] 4 Every precursor has its own advantages and disadvantages with respect to surface morphology. They were dissolved in a wide variety of alchohol solution with some content of water.…”

Section: Preparation Of Spraying Precursour Solutionmentioning

confidence: 99%

“…The degree of crystalline-whether amorphous or biphasic amorphous-crystalline and fully crystalline sate as well m properties are dependent on post substrate temperature, molar concentration and post deposition process like annealing. [2][3][4] Zirconium oxide (ZrO 2 ) has high refractive index, high melting point, high resistance to oxidation, high thermal and mechanical resistance, high thermal expansion coefficient, low thermal conductivity, good oxygen ion conductivity, high thermo chemical resistance, high corrosion resistance, high dielectric constant, photo thermal stability, etc [5][6][7]. High chemical and photochemical stability with low phonon energy makes it an optimized luminescent host [8, 10, and 11].…”

Section: Introductionmentioning

confidence: 99%

Nanostructured ZrO<sub>2</sub> Thin Films Deposited by Spray Pyrolysis Techniques for Ammonia Gas Sensing Application

Deshmukh

Bari²

2015

ILCPA

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ABSTRACT. The spray pyrolysis deposition technique has number of advantages to produce advance nanostructured oxide films. The film surface morphology and structure depends on the precursor and doping solution and solvents used with their optimized parameters. The surface to volume ratio is achieved is beneficial to gas sensing. Therefore in this paper we report the nanostructured ZrO 2 thin films was prepared using spray pyrolysis technique for ammonia gas sensing. There is various precursors such as Zirconium acetylacetonate, Zirconium nitrate, Zirconium tetra chloride etc. In spite of them, the Zirconium oxychloride octohydrate (0.05 M) was chosen as precursor solution and was prepared by dissolving in pure distilled water (Solvent). The films were deposited on heated glass substrate at 350• C and were annealed at 500 • C for 1 hrs. It was characterized using XRD, FESEM, and TEM technique to examine crystal structure, surface morphology and microstructure properties. The average crystallite and grain size observed to be nanostructured in nature. The different test target gas performances were tested with various concentrations at different operating temperature. The films sprayed for 20 min with optimized spray parameter were observed to be most sensitive (S=58.5) to NH 3 for 500 ppm at 150 0 C. The film thickness dependence parameters: FWHM (0.02678 radians) for peak 111, Inter-planer distance (d=0.2958 nm), lattice parameters Inter-atomic spacing ( a=0.511 nm), atomic volume (a 3 = 133Å 3 ),micro strain (2.8 to 0.76 x 10 -2 ), crystallite size (4-5nm) average grain size (32nm), dislocation density (1.73 x10 15 lines/cm 2 ), texture coefficient (>1), specific surface area(31 m 2 /g), activation energy and band gap were studied. The sensor shows quick response (4 s) and fast recovery (10 s). Reported results are discussed and interpreted

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Spray pyrolysis deposition of nanostructured zirconia thin films

Cited by 56 publications

References 36 publications

Thin nanocrystalline TiO2–SnO2 sprayed films: Influence of the dopant concentration, substrate and thermal treatment on the phase composition and crystallites sizes

Thin nanocrystalline TiO2–SnO2 sprayed films: Influence of the dopant concentration, substrate and thermal treatment on the phase composition and crystallites sizes

Multicolored photoluminescence and structural properties of zirconium oxide films co-doped with Tb3+ and Eu3+ ions

Nanostructured ZrO<sub>2</sub> Thin Films Deposited by Spray Pyrolysis Techniques for Ammonia Gas Sensing Application

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