Magnetic anisotropy is a key property of thin magnetic films, and its control is crucial for device applications, [1,2] e.g., for spin-valves in which the magnetization direction determines the state of the device, [3][4][5] as well as for designing skyrmionhosting heterostructures, [6] to name a few examples. Magnetic anisotropy has essentially two distinct origins, namely a macroscopic one due to, e.g., grain boundaries, and a microscopic one due to the electronic structure, as induced by the orbital moment anisotropy and magnetic dipole term. [7] Common ways of controlling the anisotropy are via the choice of crystal orientation of the substrate [8] or overlayer, [9] the film thickness, [10] or the surface morphology, [11][12][13][14] which can be engineered in clever ways. [15] Another way of accomplishing in-plane anisotropy control is by using glancing angle deposition (GLAD). [16][17][18] The principle of the technique is as follows: [19][20][21] when a film is deposited at a small, glancing angle, i.e., not under normal incidence as usual in thin film deposition, the incoming atoms will deposit preferentially on the side of the grains facing the deposition source. This so-called shadow effect will result in tilted columnar growth, with the columns tilting toward the deposition source. This structural uniaxial anisotropy will, in turn, affect the magnetic anisotropy, whereby the direction toward the deposition source will either become the hard or the easy axis. The dependence of the anisotropy energy on the deposition angle and the thickness has been reported for GLAD films, [16,22] with a switch of the easy axis direction from parallel to perpendicular to the growth direction. So far, most of the GLAD growth has been carried out on amorphous substrates, such as plastic or glass, [22] which is useful for high-density recording tapes. However, for magnetic device applications, and in general for the integration with functional layers, the GLAD films have to be deposited onto crystalline substrates or layers. The effect of the crystal structure of the substrate or underlayer on GLAD growth has not been investigated in detail before.The combination of ferromagnetic layers with large spinorbit coupling and dielectric materials is particularly promising for exploring all-electric device schemes for magnetic random-access memory applications. [23,24] While the combination of a heavy metal such as Pt and a ferromagnetic layer such as Co exhibits an efficient charge-to-spin conversion efficiency [25] and enables current-induced spin-orbit torque switching of an adjacent Co layer, [26] the proximity to an MgO layer induces perpendicular magnetic anisotropy in the Co layer. [27] This material combination also allows for a tuning of its energy terms, enabling the nucleation of magnetic skyrmion bubbles. [28] Here, we report the investigation on the ability of GLAD to control the anisotropy of Co films on Pt-coated MgO(001) and lower symmetry MgO(110) substrates. We carried out structural and magnetic studies to