Spectroscopic study on amorphous tantalum oxynitride thin films prepared by reactive gas-timing RF magnetron sputtering

Lertvanithphol, Tossaporn; Rakreungdet, Worawarong; Chananonnawathorn, Chanunthorn; Eiamchai, Pitak; Limwichean, Saksorn; Nuntawong, Noppadon; Patthanasettakul, Viyapol; Klamchuen, Annop; Khemasiri, Narathon; Nukeaw, Jiti; Seawsakul, Kittikhun; Songsiriritthigul, Chomphunuch; Chanlek, Narong; Nakajima, Hideki; Songsiriritthigul, Prayoon; Horprathum, Mati

doi:10.1016/j.apsusc.2019.06.199

Cited by 12 publications

(9 citation statements)

References 33 publications

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“…The thickness of the native oxide on silicon surface possibly originated from moister and oxygen in air is fixed at 2 nm. [21,23,24] The effective thickness (d eff ) and the effective dielectric function (𝜖 eff ) related to localized plasmonic resonance properties of ZrN films are determined through a combination of Drude model and Gaussian formula as presented in Figure 2b which is an analyzed result of optimized Au films (Figure S7, Supporting Information) . [31,32] Note that the optimization of the sputtered Au thin film related to spectroscopy enhancement can see elsewhere.…”

Section: Resultsmentioning

confidence: 99%

“…[3,13] V. Yordsri National Metal and Materials Technology Center (MTEC) NSTDA 111 Thailand Science Park, Paholyothin Rd., Klong Nueng, Klong Luang, In this study, we fabricate ZrN thin film SERS substrate using reactive gas-timing (RGT) rf magnetron sputtering technique. [5,15,[20][21][22][23][24] The tailored properties of ZrN thin film exploited for SERS activity could be achieved by controlling an amount of sputtered atom from the target and enriching sputtered energy through a turn-on timing of Ar sequence variation. [5,15,20,22] We find that the spatially plasmonic hotspots on the surface of ZrN SERS substrate, resulting from the discrete conductive surface profile, strongly relate to non-stoichiometric composition and the degree of (200)-oriented texture at the surface of ZrN thin film.…”

Section: Introductionmentioning

confidence: 99%

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Reusability, Long‐Life Storage and Highly Sensitive Zirconium Nitride (ZrN) Surface‐Enhanced Raman Spectroscopy (SERS) Substrate Fabricated by Reactive Gas‐Timing Rf Magnetron Sputtering

Sucheewa,

Wongwiriyapan,

Rattanawarinchai

et al. 2023

Adv Materials Inter

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Transition metal nitrides (TMN) are promising material alternative to replace noble metals in the field of plasmonic applications, especially surface‐enhanced Raman spectroscopy (SERS). Here we demonstrate a practical surface enhanced Raman spectroscopy (SERS) substrate using zirconium nitride (ZrN) thin films grown by reactive gas‐timing (RGT) rf magnetron sputtering. The tailored properties of ZrN thin film exploited for SERS activity could be achieved to obtain a highly sensitive ZrN thin film SERS substrate with the enhancement factor (EF) of 1.24 × 106 and 4.8 %RSD at 1626 cm‐1 toward methylene blue (MB) analyte which are comparable to the optimized Au sputtered thin films (EF=1.18 × 106 and with 5.1%RSD). We find that the spatial plasmonic hotspots on the surface of ZrN SERS substrate controlled by the turn‐on timing of Ar:N2 sputtered gas sequence, leading to the discrete conductive surface profile, strongly relates to non‐stoichiometric composition and the degree of (200)‐oriented texture at the surface of ZrN thin film. Furthermore, ZrN thin film SERS substrates exhibit an excellent recyclability more than 30 cycles with simple cleaning process and a storage time longer than 6 months. The detection and reusability of ZrN SERS substrate on the low concentration of trinitrotoluene (TNT) for homeland security are also performed.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Reusability, Long‐Life Storage and Highly Sensitive Zirconium Nitride (ZrN) Surface‐Enhanced Raman Spectroscopy (SERS) Substrate Fabricated by Reactive Gas‐Timing Rf Magnetron Sputtering

Sucheewa,

Wongwiriyapan,

Rattanawarinchai

et al. 2023

Adv Materials Inter

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“…O1 s spectra of NPT25 and NPT65 samples (Figure c,e) revealed two peaks at 530.3 and 530.2 eV for NPT25 and NPT65, respectively. These peaks belonged to Ta 2 O 5 , while deconvolution of the peaks revealed Ta─OH at 531.2 and 532.1 eV for NPT25 and NPT65 samples, respectively (Lertvanithphol et al, ; Pan et al, ).…”

Section: Resultsmentioning

confidence: 99%

Fabrication and cellular interactions of nanoporous tantalum oxide

et al. 2020

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Tantalum possesses remarkable chemical and mechanical properties, and thus it is considered to be one of the next generation implant materials. However, the biological properties of tantalum remain to be improved for its use in tissue engineering applications. To enhance its cellular interactions, implants made of tantalum could be modified to obtain nanofeatured surfaces via the electrochemical anodization process. In this study, anodization parameters were adjusted to obtain a nanoporous surface morphology on tantalum surfaces and systematically altered to control the pore sizes from 25 to 65 nm using an aqueous HF:H2SO4 electrolyte. Results indicated the formation of Ta2O5‐based nanoporous surface layers, which had up to 28% more surface area and increased nanophase roughness (more than twofolds) compared to nonporous tantalum upon the anodization. It was observed that the nanoporous tantalum oxide surfaces promoted nearly 25% more fibroblast proliferation at 5 days in vitro and 15.5% more cellular spreading. Thus, nanoporous tantalum oxide surfaces can be used to increase biological interactions of the cells and provide a means of improving bioactivity of tantalum for biomaterial applications.

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“…ZnO-NRs were grown on the Ag film via the seed-assisted hydrothermal process, as shown in Figure . First, the Ag seed layer with a thickness of 200 nm was deposited on the (111) Si substrate using the gas-timing (GT) rf magnetron sputtering technique. − It should be noted that 10 nm of the titanium (Ti) film was utilized as a buffer layer between the Si and Ag seed layer to adhere the Ag film on the surface of the substrate. The peak intensity ratio between the (111) and (200) planes of the Ag seed layer ( I (111)/(200) ratio) was widely varied from 2.9 to 40.8, providing the texture orientation along the (111) plane of Ag in the range of 74.4–97.6%.…”

Section: Methodsmentioning

confidence: 99%

ZnO Nanorods Grown on Heterogenous Ag Seed Layers for Single-Cell Fluorescence Bioassays

Muensri

Treetong

Namdee

et al. 2021

ACS Appl. Nano Mater.

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Here we demonstrate the controllability of the morphology of hydrothermal ZnO nanorods (ZnO-NRs) grown on heterogenous Ag seed layers. By varying the crystal orientation of silver thin films (Ag), a high density of ZnO-NRs could be obtained. We find that the density of ZnO-NRs strongly relates to the peak intensity ratio between (111) and (200) planes of Ag thin films due to a heteroepitaxy between (0002) ZnO and (111) Ag rather than that of grain boundary nucleation and/or surface nucleation. In addition, the optimized heterostructure of ZnO nanorod/Ag arrays is investigated via a critical concentration for nucleation and used as a fluorescence enhancement substrate (FES). The experimental results have shown that the FES presents an ability to detect a biological sample (PC-3 cell) with a high sensitivity and low detection limit of 1 cell/μL. Our results highlight that understanding an important key to control and design the morphology of heterogeneous hydrothermal ZnO-NR growth is essential to open up the opportunities for fundamental studies and applications in high-performance integrated nanodevices.

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Spectroscopic study on amorphous tantalum oxynitride thin films prepared by reactive gas-timing RF magnetron sputtering

Cited by 12 publications

References 33 publications

Reusability, Long‐Life Storage and Highly Sensitive Zirconium Nitride (ZrN) Surface‐Enhanced Raman Spectroscopy (SERS) Substrate Fabricated by Reactive Gas‐Timing Rf Magnetron Sputtering

Reusability, Long‐Life Storage and Highly Sensitive Zirconium Nitride (ZrN) Surface‐Enhanced Raman Spectroscopy (SERS) Substrate Fabricated by Reactive Gas‐Timing Rf Magnetron Sputtering

Fabrication and cellular interactions of nanoporous tantalum oxide

ZnO Nanorods Grown on Heterogenous Ag Seed Layers for Single-Cell Fluorescence Bioassays

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