Spectroscopic ellipsometry of materials for infrared micro‐device fabrication

Abstract

For many common types of process materials used in the fabrication of infrared microelectronic devices there is a lack of information available in the literature regarding their thin‐film optical properties over the wavelength range of 2 to 30 micrometers. In this article, spectroscopic ellipsometry is used to determine room‐temperature optical constants in the infrared for a variety of organic and inorganic coatings commonly used in fabrication. Examples include coatings used for photolithography, coating, passivation, planarization, index matching, and stand‐off. Applications include infrared frequency selective surfaces, antennas, micro‐displays, and flexible substrates. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

Large area infrared frequency selective surface with dimensions reproducible by optical lithography

“…The bottom graph in Fig. 13,14 The need for scaling the particle reflectivity measurement is primarily a result of the lack of particles filling the FTIR measurement area. (1) to the spectral shape of the FSS particle reflectivity.…”

Comparison of quarter-wave retarders over finite spectral and angular bandwidths for infrared polarimetric-imaging applications

“…Secondly, the phase shift of the meanderline QWP exhibits two noticeable dips in its spectrum that signify further departure from ideal behavior. These spectral minima correspond to the phonon modes of benzocyclobutene (BCB), the dielectric layer that was used in the construction of the multilayer component [21]. However, as shown in Fig.…”

Experimental demonstration of the optical Helmholtz resonance

“…Other resonances appear at lower wavelengths between 500 nm and 700 nm. The small peak at λ = 3.4 µm is due to a vibrational absorption of BCB that is enhanced by the Helmholtz resonator 21 . For the sake of comparison, the absorption spectra are also plotted under the same illumination conditions for an array of slits (height 4h s , width w s ) and for an array of cavity filled with BCB (width w b , height h b ) that also exhibit resonant absorption, but at lower wavelengths.…”

“…with γ = 0.055 and λ p = 159 nm. The BCB was described by a Lorentz model fitting experimental data 21 . The computed absorption spectrum, for a transverse magnetic (TM) polarized and normally incident light, is plotted in Fig.…”