Spectroscopic analysis in laser annealing LT poly-Si TFTs

Shih, Chu-Jung; Lu, I‐Min; Wang, Liming

doi:10.1109/asid.1999.762722

Proceedings of 5th Asian Symposium on Information Display. ASID '99 (IEEE Cat. No.99EX291)

DOI: 10.1109/asid.1999.762722

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Spectroscopic analysis in laser annealing LT poly-Si TFTs

Chu-Jung Shih

I‐Min Lu²,

Liming Wang³

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Spectroscopic analysis in laser annealing LT poly-Si TFTs

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References 3 publications

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