This article reports the co-deposition process of TiN 0.9 and (Fe,Cr) 2 N compounds on SS-321 substrate using a 2.3 kJ dense plasma focus device operated with N 2 discharges. X-ray diffraction analysis is performed to investigate the ion-induced changes in the near surface structure of the SS-321. Scanning electron microscopy with the energy dispersive X-ray spectroscopy is carried out to analyse the surface morphology and the elemental composition of the nitrided samples. The results reveal that at the low fluence of ion bombardment, a non-stoichiometric tertiary phase (Fe,Cr) x N is developed, which transforms into a stable stoichiometric compound (Fe,Cr) 2 N by increasing the ion flux. Some CrN precipitates are also observed because of the thermal effect produced by the bombardment of energetic ion beam. Vickers micro-hardness values are increased more than twice for typical ion nitrided samples.