Specifics of magnetron sputtering of lithium from liquid-phase target

Mochalov, S. É.; Nurgaliev, A. R.; Kuzmina, Elena; Иванов, А. Л.; Колосницын, В. С.

doi:10.1016/j.vacuum.2019.108816

Cited by 6 publications

(8 citation statements)

References 39 publications

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“…Finally, thermal evaporation has been demonstrated to be the most appropriate PVD technique for obtaining thin films of metallic lithium, and it can hold a relevant position for the future of LMBs. [147][148][149][150][151][152][153] LMAs produced by PVD in general, including evaporation, are particularly good in terms of homogeneity and conformality of the surface, with defect-free surfaces being achievable. Moreover, PVD offers really good control of the thickness for lithium layers that could be in the range from nanometers to tens of micrometers, thus, being possible to overcome the current limitation on thickness for the conventional method.…”

Section: Thermal Evaporationmentioning

confidence: 99%

“…Thus, improved methods are strongly needed of either fabricating lithium sputter targets, as suggested by Neumann et al., [ 148 ] or improved associated methods of sputtering, as proposed by Mochalov et al. [ 149 ]…”

Section: Production Of Lithium Metal Anodesmentioning

confidence: 99%

“…Moreover, a Li sputter target typically includes a Cu backing plate or similar support structure due to the malleable nature of Li; usually, the Li target heats up during the sputtering process and it can melt and/or have very poor adhesion onto the backing plate. Thus, improved methods are strongly needed of either fabricating lithium sputter targets, as suggested by Neumann et al, [148] or improved associated methods of sputtering, as proposed by Mochalov et al [149]…”

Section: Sputter Depositionmentioning

confidence: 99%

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Current Status and Future Perspective on Lithium Metal Anode Production Methods

Acebedo

Morant‐Miñana

Gonzalo

et al. 2023

Advanced Energy Materials

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Lithium metal batteries (LMBs) are one of the most promising energy storage technologies that would overcome the limitations of current Li‐ion batteries, based on their low density (0.534 g cm−3), low reduction potential (−3.04 V vs Standard Hydrogen Electrode) as well as their high theoretical capacities (3860 mAh g−1 and 2061 mAh cm−3). The overall cell mass and volume would be reduced while both gravimetric and volumetric energy densities would be greatly improved. Their electrochemical performance, however, is hampered by the low efficiency at high current densities and continuous degradation, which are related, among other factors, to the properties of the lithium metal anode (LMA). Hence, the production and processing of LMAs is crucial to obtain the desired properties that would enable LMBs. Here, the conventional method used for the production of LMAs, which is the combination of extraction, electrowinning, extrusion, and rolling processes, is reviewed. Then, the advances in the different alternative methods that can be used to produce and improve the properties of LMAs are described, which are divided into vapor phase, liquid phase, and electrodeposition. Within this last method, the anode‐less concept, for which different approaches to the development of advanced current collectors are illustrated, is included.

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Section: Thermal Evaporationmentioning

confidence: 99%

Section: Production Of Lithium Metal Anodesmentioning

confidence: 99%

Section: Sputter Depositionmentioning

confidence: 99%

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Current Status and Future Perspective on Lithium Metal Anode Production Methods

Acebedo

Morant‐Miñana

Gonzalo

et al. 2023

Advanced Energy Materials

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“…Nb has a relatively low thermal conductivity (54 W (m•K) −1 ) and a high melting point (2750 K at 1 atmosphere). All these features put Nb into a rather different category of materials, as compared to those used for the HMS systems so far (Ti [3,6,9,10], Cr [5,11], Cu [12], Ni [13], Si [14], Li [15]). Nevertheless, Nb-based coatings are attractive for research community due to their high corrosion resistance [16], good biocompatibility [17], and superconducting properties [18].…”

Section: Introductionmentioning

confidence: 99%

Target heating and plasma dynamics during hot magnetron sputtering of Nb

Leonova¹,

Britun²,

Konstantinidis³

2022

J. Phys. D: Appl. Phys.

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In this work, the direct current (DC) hot magnetron sputtering (HMS) of Nb has been studied and compared with the conventional cold magnetron sputtering (CMS) discharge. Particularly, these two magnetron systems were investigated in terms of current-voltage trends, behaviour of spectral lines, target temperature, and deposition rate. The current-voltage evolution showing strong variations over time in the HMS system was used to monitor the moment when a thermionic emission becomes considerable. Meanwhile, thanks to the time-resolved optical emission spectroscopy (OES), the dynamics of plasma particles and the population of their electronic levels were analysed as a function of the target temperature. The target temperature was measured owing to both pyrometry and OES-based approach, i.e., by fitting an emission spectrum baseline. Finally, in the configuration used in this work, the deposition rate up to 100 nm/min was obtained at the applied power density of 30 W/cm2, which is 3 times higher than the maximum power density applicable to the classical CMS system. However, with further increase in the power density, the deposition rate values were found to be saturated, which is likely caused by a significant increment in a number of thermal electrons in the discharge area.

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“…[ 25 ] By applying a special magnetic field to the diode sputtering target, a variety of materials (such as metals and ceramics) could be deposited on various types/shapes of substrate materials. [ 26 ] Magnetron sputtering technique displays exceptional advantages, including i) homogeneity of coating thickness that results in the homogeneous distribution in the composite structure, ii) precise tuning of the coating composition, and iii) small grain size of the coating which is beneficial for the corresponding properties. [ 27 ] In this regard, the morphology and aerophobicity of the electrode coating were supposed to be well‐tuned by the magnetron sputtering technique.…”

Section: Introductionmentioning

confidence: 99%

Rational Surface and Interfacial Engineering of IrO₂/TiO₂ Nanosheet Arrays toward High‐Performance Chlorine Evolution Electrocatalysis and Practical Environmental Remediation

Wang

Xue

Zhang

2021

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The chlorine evolution reaction (CER) is a critical and commercially valuable electrochemical reaction in industrial‐scale utilization, including the Chlor‐alkali industry, seawater electrolysis, and saline wastewater treatment. Aiming at boosting CER electrocatalysis, hybrid IrO2/TiO2 nanosheet arrays (NSAs) with rational surface and interfacial tuning strategies are proposed in this study. The IrO2/TiO2 NSAs exhibit superb CER electrocatalytic activity with a low overpotential (44 mV) at 10 mA cm−2, low Tafel slope of 40 mV dec−1, high CER selectivity (95.8%), and long‐term durability, outperforming most of the existing counterparts. The boosting mechanism is proposed that the aerophobic/hydrophilic surface engineering and interfacial electronic structure tuning of IrO2/TiO2 are beneficial for the Cl− mass‐transfer, Cl2 release, and Volmer–Heyvrosky kinetics during the CER. Practical saline wastewater treatment by using the IrO2/TiO2 NSAs electrode is further conducted, demonstrating it has a higher p‐nitrophenol degradation ratio (95.10% in 60 min) than that of other electrodes. The rational surface and interfacial engineering of IrO2/TiO2 NSAs can open up a new way to design highly efficient electrocatalysts for industrial application and environmental remediation.

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Specifics of magnetron sputtering of lithium from liquid-phase target

Cited by 6 publications

References 39 publications

Current Status and Future Perspective on Lithium Metal Anode Production Methods

Current Status and Future Perspective on Lithium Metal Anode Production Methods

Target heating and plasma dynamics during hot magnetron sputtering of Nb

Rational Surface and Interfacial Engineering of IrO₂/TiO₂ Nanosheet Arrays toward High‐Performance Chlorine Evolution Electrocatalysis and Practical Environmental Remediation

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Specifics of magnetron sputtering of lithium from liquid-phase target

Cited by 6 publications

References 39 publications

Current Status and Future Perspective on Lithium Metal Anode Production Methods

Current Status and Future Perspective on Lithium Metal Anode Production Methods

Target heating and plasma dynamics during hot magnetron sputtering of Nb

Rational Surface and Interfacial Engineering of IrO2/TiO2 Nanosheet Arrays toward High‐Performance Chlorine Evolution Electrocatalysis and Practical Environmental Remediation

Contact Info

Product

Resources

About

Rational Surface and Interfacial Engineering of IrO₂/TiO₂ Nanosheet Arrays toward High‐Performance Chlorine Evolution Electrocatalysis and Practical Environmental Remediation