Specific features of the laser irradiation of thin molybdenum films

Волков, Алексей Васильевич; Kazanskiy, Nikolay L.; Moiseev, O. Yu.; Паранин, В. Д.; Poletayev, S. D.; Chistyakov, Igor V.

doi:10.1134/s1063784216040241

Cited by 8 publications

(2 citation statements)

References 6 publications

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“…In this respect is perspective thin films of molybdenum [6] as molybdenum has the following features are perspective: -low temperatures of oxidation of metal, and oxide sublimation; -high ratio of heat diffusivities metal/oxide. In works [10][11][12] the possibility of forming of optical microstructures by a laser ablation of thin films of molybdenum is shown. The effect of triple reducing the size of a zone of an ablation has been found (in comparison with diameter of a focal spot).…”

Section: Introductionmentioning

confidence: 99%

The Efficiency of Optical Microstructures Formed on Molybdenum Films

Poletayev¹,

Volotovskiy²

2016

Collection of Selected Papers of the II International Conference on Information Technology and Nanotechnology

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Abstract.We have considered influence of technological errors of formation of the amplitude optical lattices made by method of a laser ablyation of thin films of molybdenum on distribution of diffraction orders in a distant zone of diffraction. For this purpose we have digitized a profile of a site of the created diffraction structure with the subsequent transformation to amplitude or phase functions of a transmission.Keywords: diffractive microrelief, metallic mask, laser ablation, thermochemical recording, film molybdenum, reactive ion etching.Citation: Poletaev SD, Volotovsky SG. The efficiency of optical microstructures formed on molybdenum films.

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Section: Introductionmentioning

confidence: 99%

The Efficiency of Optical Microstructures Formed on Molybdenum Films

Poletayev¹,

Volotovskiy²

2016

Collection of Selected Papers of the II International Conference on Information Technology and Nanotechnology

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“…Thermochemical chrome oxidation remains the most developed and common method of producing lithographic masks and diffraction optical elements (DOEs) both for binary [6,7] and gray-scale DOEs [8]. Comparatively recently research has been underway devoted to further development of the technology of the additive method of producing phase grating microrelief [9,10]. The technology proposed consists in thermal oxidation of a thin metal molybdenum layer (15 -70 nm).…”

Section: Introductionmentioning

confidence: 99%

Amplitude – Phase Diffraction Gratings Based on Thin Layer of Indium Tin Oxide

Паранин

Карпеев

2016

Collection of Selected Papers of the II International Conference on Information Technology and Nanotechnology

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Abstract.It is offered to operate the transmittance of a diffraction mask by changing the interference properties of a thin optical layer. Based on the results of the offered approach the amplitude-phase diffraction grating with the period of 300 microns has been made from the 115 nm transparent indium tin oxide (ITO) film. Optical and dimensional parameters of the diffraction mask have been investigated by using the ellipsometry, interferometry and spectroscopy. Computer modeling of the diffraction scattering and its experimental investigation have been carried out.Keywords: amplitude-phase diffraction grating, thin layer, indium tin oxide, ellipsometry, interferometry, spectroscopy Citation: Paranin VD, Karpeev SV. Amplitude -phase diffraction gratings based on thin layer of indium tin oxide.

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The maker of harmonic lens microreliefs

Sokolov

2017

Procedia Engineering

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Specific features of the laser irradiation of thin molybdenum films

Cited by 8 publications

References 6 publications

The Efficiency of Optical Microstructures Formed on Molybdenum Films

The Efficiency of Optical Microstructures Formed on Molybdenum Films

Amplitude – Phase Diffraction Gratings Based on Thin Layer of Indium Tin Oxide

The maker of harmonic lens microreliefs

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