Spatial variations of plasma structures under the influence of electrically biased probes and test objects measured by optical emission computerized tomography

Schielke, W; Röttig, G; Ohl, A.; Hanneman, M.; Schleinitz, W.

doi:10.1016/0257-8972(95)08331-6

Cited by 5 publications

(2 citation statements)

References 6 publications

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“…This implies the use of so-called tomographic optical spectroscopy (TOS) which is now a well established method [2][3][4]. Various plasmas have been investigated by TOS [5][6][7][8][9][10][11][12][13][14]. Here, we deal with argon-nitrogen discharges.…”

Section: Introductionmentioning

confidence: 99%

Spatially-resolved spectroscopic optical emission of dc-magnetron sputtering discharges in argon-nitrogen gas mixtures

Debal

Wautelet

Bretagne

et al. 2000

Plasma Sources Sci. Technol.

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The spatially-resolved spectroscopic optical emission of various lines of a dc-magnetron sputtering discharge (with cylindrical symmetry) is studied. The discharge works with an aluminium-based alloy cathode. Ar-N 2 gas mixtures are used. Emission lines corresponding to the cathode (Al) and the gas discharge species (Ar, N 2 , N + 2 , N) are considered. The three-dimensional emission profiles, I (r, z), of the lines are measured, where r is the distance from the centre of the cathode and z is the height from the cathode. I (r, z) profiles are studied as a function of the total pressure, the gas composition and the electrical power. In order to compare the results, I (r, z) profiles are fitted with an empirical analytical function. It turns out that the three-dimensional emission profiles of the various lines behave differently. The results are understood by taking into account the motion of electrons in our measured magnetic field distribution and the role of electrons in populating the upper levels of the optical transitions.

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Section: Introductionmentioning

confidence: 99%

Spatially-resolved spectroscopic optical emission of dc-magnetron sputtering discharges in argon-nitrogen gas mixtures

Debal

Wautelet

Bretagne

et al. 2000

Plasma Sources Sci. Technol.

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“…Their system recorded one line at a time, without using optical fibres. Schielke et al [13] perform spatial tomography of a plasma, using a telescope imaging system with one moving optical fibre and photon counter, and presented results obtained on two well separated lines (H α and H β ). A DC magnetron discharge in Ar, with an Al target, was tomographically characterized by Miyake et al [14].…”

Section: Introductionmentioning

confidence: 99%

A simple experimental system for the determination of spatial spectroscopic optical emission

Debal

Wautelet

Dauchot

et al. 1997

Meas. Sci. Technol.

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An experimental set-up for the determination of spatial spectroscopic optical emission of sources with cylindrical symmetry is presented. It combines a fibre optic system with a monochromator coupled to a CCD camera. The light emitted by the source is sent to the inputs of ten optical fibres through a collimating system. The outputs of these optical fibres are coupled to the entrance slit of a monochromator. The CCD camera is at the output slit. This allows simultaneous acquisition of ten spectra, each being associated with a small zone of the source. By translation of the optical fibres, the whole source is studied. The data are then analysed by means of a reconstruction program in order to obtain the spatial spectroscopic optical emission profile. This experimental set-up is used to deduce the spatial optical emission of various lines of a RF-powered magnetron discharge. The advantages and limitations of the method are discussed.

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On the capability of spectrally resolved optical emission tomography for the diagnostic of nonisothermal low-pressure technological plasmas

Schielke¹,

Röttig²,

Bandlow

et al. 1997

Surface and Coatings Technology

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Spatial variations of plasma structures under the influence of electrically biased probes and test objects measured by optical emission computerized tomography

Cited by 5 publications

References 6 publications

Spatially-resolved spectroscopic optical emission of dc-magnetron sputtering discharges in argon-nitrogen gas mixtures

Spatially-resolved spectroscopic optical emission of dc-magnetron sputtering discharges in argon-nitrogen gas mixtures

A simple experimental system for the determination of spatial spectroscopic optical emission

On the capability of spectrally resolved optical emission tomography for the diagnostic of nonisothermal low-pressure technological plasmas

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