Spatial variations in the charge density of argon discharges in the Gaseous Electronics Conference reference reactor

Overzet, Lawrence; Hopkins, M. B.

doi:10.1063/1.110456

Cited by 55 publications

(37 citation statements)

References 12 publications

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“…With an increasing RF voltage, the discharge also expanded into the outer chamber and transformed into the anomalous mode. Nonuniform radial distribution of plasma parameters in GEC cell was predicted in theory in [33] and [38], whereas the paper of Overzet and Hopkins [26] demonstrated in experiment the presence of the plasma density maximum near the radial boundary of electrodes in agreement with the results of our paper. Fig.…”

Section: Resultssupporting

confidence: 81%

The Effect of Discharge Chamber Geometry on the Characteristics of Low-Pressure RF Capacitive Discharges

Lisovskiy

Booth

Landry³

et al. 2007

IEEE Trans. Plasma Sci.

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Abstract-We report the measured extinction curves and current-voltage characteristics (CVCs) in several gases of RF capacitive discharges excited at 13.56 MHz in chambers of three different geometries: 1) parallel plates surrounded by a dielectric cylinder ("symmetric parallel plate"); 2) parallel plates surrounded by a metallic cylinder ("asymmetric confined"); and 3) parallel plates inside a much larger metallic chamber ("asymmetric unconfined"), similar to the gaseous electronics conference reference cell. The extinction curves and the CVCs show differences between the symmetric, asymmetric confined, and asymmetric unconfined chamber configurations. In particular, the discharges exist over a much broader range of RF voltages and gas pressures for the asymmetric unconfined chamber. For symmetric and asymmetric confined discharges, the extinction curves are close to each other in the regions near the minima and at lower pressure, but at higher pressure, the extinction curve of the asymmetric confined discharge runs at a lower voltage than the one for the discharge in a symmetric chamber. In the particular cases of an "asymmetric unconfined chamber" discharge or "asymmetric confined" one, the RF discharge experiences the transition from a "weak-current" mode to a "strong-current" one at lower RF voltages than is the case for a "symmetric parallel-plate" discharge.

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Section: Resultssupporting

confidence: 81%

The Effect of Discharge Chamber Geometry on the Characteristics of Low-Pressure RF Capacitive Discharges

Lisovskiy

Booth

Landry³

et al. 2007

IEEE Trans. Plasma Sci.

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“…They studied the distribution of the capacitive, inductive and total power across the electrode area at different frequencies and plasma concentration values. Overzet and Hopkins [16] obtained with a Langmuir probe that in a GEC (Gaseous Electronics Conference) reference cell the radial profile of the plasma concentration possessed an abrupt peak near the electrode edge associated with an increased electric field in this region. Lai et al [17] employed the SCCMÔ asymmetric discharge chamber (SCCMÔ is a registered trademark or a trademark of Tokyo Electron Limited in Japan and other countries) and obtained the donut-shaped profile of etching (with the smallest etching rate at the centre and at the very edge of the plate, whereas the largest etching rate was observed approximately at the distance of 5/8 radius from the plate centre).…”

Section: Introductionmentioning

confidence: 99%

Radial structure of low pressure rf capacitive discharges

Lisovskiy

Kharchenko

Yegorenkov

2010

Vacuum

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a b s t r a c tThis paper studies the glow intensity distribution of the discharge plasma against the tube radius and reports the radial profiles of electron temperature and plasma concentration in the rf capacitive discharge registered with a Langmuir probe. An abrupt increase of electron temperature and glow intensity near the tube wall in the weak-current a-mode of the rf capacitive discharge is revealed, the radial distribution of plasma concentration and ion flow to the electrodes possessing a maximum near the radial sheath boundary. In the g-mode of the rf capacitive discharge the electron temperature decrease in the total plasma volume leads to an electric field weakening and the peak of the glow intensity near the tube wall vanishes. The radial sheath thickness in the a-mode of the rf capacitive discharge obtained with 2D simulation experiences pulsations during the rf field period, the changing radial electric field heating electrons and increasing the plasma concentration near the boundary of the radial sheath.

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“…[12]. In an asymmetric discharge, the densities near the grounded electrode are low throughout the cycle.…”

Section: Modeling Resultsmentioning

confidence: 99%

One-Dimensional Modeling Studies of the Gaseous Electronics Conference Rf Reference Cell

Meyyappan

1995

J. Res. Natl. Inst. Stand. Technol.

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A review of the one-dimensional modeling studies in the literature of the Gaseous Electronics Conference (GEC) reference plasma reactor is presented. Most of the studies are based on the fluid model description of the discharge and some utilize hybrid fluid-kinetic schemes. Both models are discussed here briefly. The models provide a basic understanding of the discharge mechanisms and reproduce several critical discharge features observed experimentally.

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Spatial variations in the charge density of argon discharges in the Gaseous Electronics Conference reference reactor

Cited by 55 publications

References 12 publications

The Effect of Discharge Chamber Geometry on the Characteristics of Low-Pressure RF Capacitive Discharges

The Effect of Discharge Chamber Geometry on the Characteristics of Low-Pressure RF Capacitive Discharges

Radial structure of low pressure rf capacitive discharges

One-Dimensional Modeling Studies of the Gaseous Electronics Conference Rf Reference Cell

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