1995
DOI: 10.6028/jres.100.035
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One-Dimensional Modeling Studies of the Gaseous Electronics Conference Rf Reference Cell

Abstract: A review of the one-dimensional modeling studies in the literature of the Gaseous Electronics Conference (GEC) reference plasma reactor is presented. Most of the studies are based on the fluid model description of the discharge and some utilize hybrid fluid-kinetic schemes. Both models are discussed here briefly. The models provide a basic understanding of the discharge mechanisms and reproduce several critical discharge features observed experimentally.

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Cited by 11 publications
(4 citation statements)
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“…The approximation is used by neglecting the time and inertia derivatives in the momentum equation and deriving a modified continuity equation that is dependent on diffusion and drift velocity components in addition to reaction rate source terms (shown in equation ( 5)). The reaction rates and transport properties were obtained from the literature [30][31][32]. Further, the electron energy equation need not be solved as it is calculated from BOLSIG+.…”
Section: Discharge Physics-description Of One-dimensional Appj Modelmentioning
confidence: 99%
“…The approximation is used by neglecting the time and inertia derivatives in the momentum equation and deriving a modified continuity equation that is dependent on diffusion and drift velocity components in addition to reaction rate source terms (shown in equation ( 5)). The reaction rates and transport properties were obtained from the literature [30][31][32]. Further, the electron energy equation need not be solved as it is calculated from BOLSIG+.…”
Section: Discharge Physics-description Of One-dimensional Appj Modelmentioning
confidence: 99%
“…Use of the GEC Cell has stimulated the plasma modeling community. As seen in the two review articles contained in this Special Issue of the Journal of Research of the National Institute of Standards and Technology [ 14 , 15 ], significant progress has been made in the modeling of various discharges in the GEC Cell, due in part to the availability of experimental data for comparison. Additionally, the emergence of the reference-cell concept prompted the modeling community to initiate a “benchmark model comparison,” where each modeler applied their own model to a given set of experimental conditions [ 16 ].…”
Section: Significant Resultsmentioning
confidence: 99%
“…Elastic collision is the dominant volumetric electron energy loss in atmosphere argon glow discharge. However, elastic collision loss is negligible in low pressure glow discharge and is often neglected in the modeling of glow discharge [33] . Fig.…”
Section: Basic Plasma Characteristicsmentioning
confidence: 99%