2006
DOI: 10.1116/1.2387156
|View full text |Cite
|
Sign up to set email alerts
|

Spatial light modulator for maskless optical projection lithography

Abstract: Spatial light modulators (SLMs) designed to replace photomasks for optical lithography have been designed, fabricated, and tested. These microelectromechanical devices are fabricated with alternating polycrystalline Si and sacrificial SiO2 layers that are patterned by a 193nm wavelength scanner to dimensions as small as 150nm. Aerial image simulations were used to define the mechanical requirements of the devices. Piston motion of electrically actuated devices was measured with an optical profilometer. The mea… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
13
0

Year Published

2008
2008
2016
2016

Publication Types

Select...
4
2
1

Relationship

1
6

Authors

Journals

citations
Cited by 23 publications
(13 citation statements)
references
References 4 publications
0
13
0
Order By: Relevance
“…Maskless lithography that utilizes a liquid crystal device (LCD) or a digital micromirror device (DMD) [5,6] as an electrically controllable spatial light modulator (SLM) has been developed in order to simplify the conventional photolithography [7][8][9][10]. A computer-generated photomask serves as a reconfigurable mask in the lithography system.…”
Section: Introductionmentioning
confidence: 99%
“…Maskless lithography that utilizes a liquid crystal device (LCD) or a digital micromirror device (DMD) [5,6] as an electrically controllable spatial light modulator (SLM) has been developed in order to simplify the conventional photolithography [7][8][9][10]. A computer-generated photomask serves as a reconfigurable mask in the lithography system.…”
Section: Introductionmentioning
confidence: 99%
“…In essence a diffraction grating was formed by the pixels themselves. Image formation using electro-statically controlled piston-only mirrors and similar optical techniques to control the phase of the reflected light have been explored before [25][26][27][28]. There are several methods to form the interference array, and these will be discussed shortly.…”
Section: Visible Light Readout Schemementioning
confidence: 99%
“…If this were indeed possible, it would also eliminate the extensive, and therefore costly, calibration procedures necessary for other technologies such as bolometers. The purpose of this paper is to report on our progress in coupling our expertise in spatial light modulator design [25][26][27][28][29] with thermally actuated MEMS cantilevers to work towards a direct-view readout technology.…”
Section: Introductionmentioning
confidence: 99%
“…Given our expertise in silicon-based MEMS technology, and in particular on spatial light modulators [1,2,17,22], we focused our fabrication efforts in the first area. In this paper, we will specifically describe our efforts to create prototypes of a "direct-view" sensor based on MEMS cantilever technology.…”
Section: Background: Longwave Ir Technologiesmentioning
confidence: 99%