Spatial coherence characterization of undulator radiation

Chang, Chang; Naulleau, Patrick; Anderson, Erik H.; Attwood, David

doi:10.1016/s0030-4018(00)00811-7

Cited by 60 publications

(52 citation statements)

References 17 publications

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“…In the EUV region, this has already successfully been achieved with beamline 12.0.1 at the ALS [23,24]. This thesis will develop a branchline to achieve the above characteristics in the SXR region.…”

Section: Euv/sxr Sourcesmentioning

confidence: 90%

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Tunable coherent radiation at soft X-ray wavelengths: Generation and interferometric applications

Rosfjord

2004

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The availability of high power, spectrally and spatially coherent soft x-rays (SXR) would facilitate a wide variety of experiments as this energy region covers the primary resonances of many magnetic and biological materials. Specifically, there are the carbon and oxygen K-edges that are critical for biological imaging in the water window and the L-edges of iron, nickel, and cobalt for which imaging and scattering studies can be performed.A new coherent soft X-ray branchline at the Advanced Light Source has begun operation (beamline 12.0.2). Using the third harmonic from an 8 cm period undulator, this branch delivers coherent soft x-rays with photon energies ranging from 200eV to 1keV. This branchline is composed of two sub-branches one at 14X demagnification and the other 8X demagnification. The former is optimized for use at 500eV and the latter at 800eV. Here the expected power from the third harmonic of this undulator and the beamline design and characterization is presented. The characterization includes measurements on available photon flux as well as a series of double pinhole experiments to determine the coherence factor with respect to transverse distance. The first high quality Airy patterns at SXR wavelengths are created with this new beamline.The operation of this new beamline allows for interferometry to be performed in the SXR region. Here an interferometric experiment designed to directly determine the index of refraction of a material under test is performed.Measurements are first made in the EUV region using an established beamline (beamline12.0.1) to measure silicon, ruthenium and tantalum silicon nitride. This work is then extended to the SXR region using beamline 12.0.2 to test chromium and vanadium.

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Section: Euv/sxr Sourcesmentioning

confidence: 90%

“…As seen in this equation, in the Fourier domain, the fringe visibility (and thus complex coherence factor) is equal to twice the relative intensity of the first order peak to that of the zeroth order peak [24,68].…”

Section: 5mentioning

confidence: 99%

Tunable coherent radiation at soft X-ray wavelengths: Generation and interferometric applications

Rosfjord

2004

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“…Synchrotron radiation is typically much more coherent than one desires for lithographic printing. This is particularly true of undulator radiation [6], but also holds for bend-magnet radiation.…”

Section: Introductionmentioning

confidence: 96%

A design study for synchrotron-based high-numerical-aperture scanning illuminators

Naulleau

Denham

Hoef

et al. 2004

Optics Communications

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Scanning illumination systems provide for a powerful and flexible means of controlling illumination coherence properties. In these systems, the desired illumination divergence is effectively synthesized through a scanning process. This method has recently been used at extreme ultraviolet (EUV) wavelengths to implement a programmable pupil fill microfield exposure system employed to lithographically characterize a 0.1-numerical aperture (NA) alphaclass EUV stepper optic. The specifics of the implementation used in that case, however, make it difficult to directly extend the implementation to higher NA optics such as the 0.3-NA MicroExposure Tool (MET) optic currently being developed for advanced lithographic studies. Here we present scanning illuminator configurations suitable for implementing high-NA lithography capabilities at a synchrotron beamline. In particular we consider the application to the 0.3-NA MET optic with a design field of view of 1×3 mm at the object plane.

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“…Paterson et al [14] successfully utilized Young's double-slit experiment [12] with X-rays, providing an efficient method for measuring coherence of undulator radiation that had previously only been applied in the visible and EUV light regime [15,16]. Leitenberger et al [17] extended the technique to hard X-rays and deployed (double and single) pin-hole diffraction using an energy-dispersive detector for simultaneously studying coherence properties of a large spectral range [18,19].…”

Section: Introductionmentioning

confidence: 99%

A robust tool for photon source geometry measurements using the fractional Talbot effect

Lovrić¹,

Oberta²,

Mohácsi³

et al. 2014

Opt. Express

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Originally published at: Lovric, Goran; Oberta, Peter; Mohacsi, Istvan; Stampanoni, Marco; Mokso, Rajmund (2014). A robust tool for photon source geometry measurements using the fractional Talbot effect. Optics Express, 22(3):2745. DOI: https://doi.org/10.1364/OE.22.002745A robust tool for photon source geometry measurements using the fractional Talbot effect Paul Scherrer Institute, 5232 Villigen, Switzerland *goran.lovric@psi.ch Abstract: A reliable measurement of beam coherence is important for optimal performance of a number of coherence methods being utilized at third-generation synchrotrons and free-electron lasers. Various approaches have been proposed in the past for determining the source size, and hence the degree of coherence; however they often require complex setups with perfect optics and suffer from undefined uncertainties. We present a robust tool for X-ray source characterization with a full quantitative uncertainty analysis for fast on-the-fly coherence measurements. The influence of three multilayer monochromator crystals on the apparent source size is evaluated using the proposed method.

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Spatial coherence characterization of undulator radiation

Cited by 60 publications

References 17 publications

Tunable coherent radiation at soft X-ray wavelengths: Generation and interferometric applications

Tunable coherent radiation at soft X-ray wavelengths: Generation and interferometric applications

A design study for synchrotron-based high-numerical-aperture scanning illuminators

A robust tool for photon source geometry measurements using the fractional Talbot effect

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