Some new results on the fabrication of and the mechanical, electrical and optical properties of i-carbon layers

Review of the tribology of diamond-like carbon

“…It increased with increasing RH, attaining values of 0.05 at RH= 10% and up to 0.19 at RH= 100%. A similar behavior was reported for films deposited by PACVD from ethylene [23]. The films showed a continuous increase in the friction coefficient with increasing RH and the friction exhibited a hysteresis effect between RH =50% and 100%.…”

“…The films showed a continuous increase in the friction coefficient with increasing RH and the friction exhibited a hysteresis effect between RH =50% and 100%. Values as low as p= 0.005 were measured in a vacuum [23]. Enke et al explained the low friction coefficients by assuming that graphitization of the surface layer of the DLC films takes place during testing.…”

Dépôt de films minces par ablation laser, le potentiel industriel

“…En dessous de ce seuil, la variété sp 2 prédomine. Certaines caractéristiques physiques de ces deux variétés diffèrent dans de larges proportions : propriétés optiques, conductibilité thermique, k (des valeurs de k = lOOOW.FC'.m" 1 ont été citées pour la variété sp 3 [23]), contraintes internes, etc.. L'épaisseur des films de la variété sp 3 est limitée à des valeur de l'ordre de 1 pm, seuil typique au-delà duquel le dépôt se sépare de son support en raison de contraintes internes très élevées [24], Des structures multicouches, constituées de séquences sp 3 -sp 2 , permettent d'atteindre des épaisseurs très supérieures sans fissuration ou pelage des dépôts. Ces structures sont obtenues en PLD par simple ajustement de la pression dans l'enceinte de dépôt, la variété sp 3 étant obtenue à basse pression (< 10" 5 mbar) et la variété sp 2 , sous une pression (argon par exemple) de l'ordre de 0,1 mbar.…”

Dual-Frequency Plasma Enhanced Chemical Vapor Deposition of Diamond-Like Carbon Thin Films

“…These features of DLC lms are connected to the lm structure. The structure of DLC lm is a mixture of some graphitic sp 2 and aliphatic sp 3 bonding and the fraction ratio of them (sp 3 /sp 2 ) strongly ascertains the physical properties of it. In general, although the mechanical and chemical characteristics are governed by amount of the sp 3 bonding, electronic and optical properties are associated to fraction of the sp 2 bonding [5,6].…”

“…DLC is a metastable material which was synthesized for the rst time in 1971 by Aisenberg and Chabot with ion beam method [1]. DLC lms show, to some extent, diamond characteristics such as high mechanical hardness [2], low friction coecient, chemical inertness and resistance [3], low thermal expansion and transparency in IR section of the electromagnetic spectrum [4]. These features of DLC lms are connected to the lm structure.…”