2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2017
DOI: 10.1109/asmc.2017.7969239
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Solved: the mystery of bright voltage contrast word-line defects for SOI technology using nanoprobing

Oliver D. Patterson
1
,
Richard F. Hafer
2
,
Sweta Pendyala
3
et al.
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Cited by 4 publications
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Nanoprober image based localization techniques for SOI technology

Pendyala
1
,
Lucarini
2
,
Tenney
3
2018
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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Nanoprober image based localization techniques for SOI technology

Pendyala
1
,
Lucarini
2
,
Tenney
3
2018
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
1
0
0
0
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Creative Use of Vector Scan for Efficient SRAM Inspection

Patterson
1
,
Peng
2
,
Hu
3
et al. 2020
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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Negative Mode E-Beam Inspection of the Contact Layer

Patterson
1
,
Faruk
2
,
Zhang3
et al. 2022
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
1
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