Nanoprober image based localization techniques for SOI technology

Pendyala, Sweta; Lucarini, Stephen; Tenney, Michael P.

doi:10.1109/asmc.2018.8373218

2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2018

DOI: 10.1109/asmc.2018.8373218

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Nanoprober image based localization techniques for SOI technology

Sweta Pendyala

Stephen Lucarini

Michael P. Tenney

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Nanoprober image based localization techniques for SOI technology

Cited by 1 publication

References 3 publications

Novel failure traces beyond the barrier on the floating device

Novel failure traces beyond the barrier on the floating device

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