Solid-state dewetting of single-crystal silicon on insulator: effect of annealing temperature and patch size

Abbarchi, Marco; Naffouti, Meher; Lodari, Mario; Salvalaglio, Marco; Backofen, Rainer; Bottein, Thomas; Voigt, Axel; David, Thomas; Claude, Jean-Benoît; Bouabdellaoui, Mohammed; Benkouider, Abdelmalek; Fraj, Ibtissem; Favre, Luc; Ronda, A.; Berbézier, Isabelle; Grosso, David; Bollani, Monica

doi:10.1016/j.mee.2018.01.002

Cited by 15 publications

(22 citation statements)

References 25 publications

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“…Top panels: dark-field optical microscope (100×magnification, NA=0.75) of monocrystalline Si islands on 25 nm BOX. From the left to the right, panels are illustrated with several islands organization obtained from different initial patch size and shape [31,35]. Bottom panels: same as the top panels for islands transferred in a PDMS slice.…”

Section: Discussionmentioning

confidence: 99%

“…We now take into account the case of templated dewetting of commercial UT-SOI: [31,35] by changing the etched patch size and shape (e.g. simple squares, squares with a central cross, parallel trenches) we obtain different arrangement of the Si particles sitting on a 25nm thick BOX ( figure 6 top panels).…”

Section: Methods B: Transfer In Pdms Slicesmentioning

confidence: 99%

“…A last example is templated dewetting of UT-SOI (figure 1(e)): [27,29,31,34,35] by etching a commercial UT-SOI (figure 1(e), first panel) with patches of well defined size and spacing and eventually adding other features (e.g. pits and holes) the annealing provides ordered arrays of individual islands (figure 1(e), second to fourth panel), complex assemblies of islands [29,34] (figure 1(e), fifth panel) and complex nanoarchitectures [31,35].…”

Section: Panorama Of Different Dewetting Scenariosmentioning

confidence: 99%

“…(e) Patterning prior to annealing (e.g. via e-beam lithography and reactive ion etching, first panel) allows to form ordered arrays of Si islands (second to fourth panel) and complex nano-architectures (fifth panel)[27,29,31,34,35].…”

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Flexible photonic devices based on dielectric antennas

et al. 2020

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Flexible and stretchable photonics are emerging fields aiming to develop novel applications where the devices need to conform to uneven surfaces or whenever lightness and reduced thickness are major requirements. However, owing to the relatively small refractive index of transparent soft matter including most polymers, these materials are not well adapted for light management at visible and near-infrared frequencies.Here we demonstrate simple, low cost and efficient protocols for fabricating Si 1−x Ge x -based, sub-micrometric dielectric antennas over record scales (50 mm wafers) with ensuing hybrid integration into different plastic supports. The transfer process has a near-unity yield: up to 99.94% for disordered structures and 99.5% for the ordered counterpart. Finally, we benchmark the optical quality of the dielectric antennas with light scattering measurements, demonstrating the control of the islands structural color and the onset of sharp Mie modes after encapsulation in plastic. Thanks to the ease of implementation of our fabrication methods, these results are relevant for the integration of SiGe-based dielectric Mie resonators in flexible substrates over large surfaces.

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Section: Discussionmentioning

confidence: 99%

Section: Methods B: Transfer In Pdms Slicesmentioning

confidence: 99%

Section: Panorama Of Different Dewetting Scenariosmentioning

confidence: 99%

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Flexible photonic devices based on dielectric antennas

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“…5 Please note that duplicate reference were detected (i.e., Refs. [28] and [35]) and provide instructions for which should be deleted or amended. We can perform renumbering of references if you provide simple instructions.…”

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confidence: 99%

Deterministic three-dimensional self-assembly of Si through a rimless and topology-preserving dewetting regime

Naffouti

Salvalaglio

David

et al. 2019

Phys. Rev. Materials

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No further publication processing will occur until we receive your response to this proof. Attached is a PDF proof of your forthcoming article in Physical Review Materials. Your article has 8 pages and the Accession Code is ME10125. Please note that as part of the production process, APS converts all articles, regardless of their original source, into standardized XML that in turn is used to create the PDF and online versions of the article as well as to populate third-party systems such as Portico, Crossref, and Web of Science. We share our authors' high expectations for the fidelity of the conversion into XML and for the accuracy and appearance of the final, formatted PDF. This process works exceptionally well for the vast majority of articles; however, please check carefully all key elements of your PDF proof, particularly any equations or tables.

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Light Emitting Si‐Based Mie Resonators: Toward a Huygens Source of Quantum Emitters

Khoury

Quard

Herzig

et al. 2022

Advanced Optical Materials

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Silicon‐based micro‐ and nano‐structures for light management at near‐infrared and visible frequencies have been widely exploited for guided optics and metasurfaces. However, light emission with this material has been hampered by the indirect character of its bandgap. Here it is shown that, via ion beam implantation, light emitting G‐centers can be directly embedded within Si‐based Mie resonators previously obtained by solid state dewetting. Size‐ and position‐dependent, directional light emission at 120 K is demonstrated experimentally and confirmed by finite difference time domain simulations. It is estimated that, with an optimal coupling of the G‐centers emission with the resonant antennas, a collection efficiency of about 90% can be reached using a conventional objective lens. The integration of these telecom‐frequency emitters in resonant antennas is relevant for their efficient exploitation in quantum optics applications and more generally to Si‐based photonic metasurfaces.

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Solid-state dewetting of single-crystal silicon on insulator: effect of annealing temperature and patch size

Cited by 15 publications

References 25 publications

Flexible photonic devices based on dielectric antennas

Flexible photonic devices based on dielectric antennas

Deterministic three-dimensional self-assembly of Si through a rimless and topology-preserving dewetting regime

Light Emitting Si‐Based Mie Resonators: Toward a Huygens Source of Quantum Emitters

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