1999
DOI: 10.1063/1.371362
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Solid-solubility limits of Be in molecular beam epitaxy grown AlxGa1−xAs layers and short-period superlattices

Abstract: The redistribution of Be in highly doped AlxGa1−xAs layers and AlxGa1−xAs/AlAs(GaAs) short period superlattices (SPSL) during molecular beam epitaxy was investigated by secondary ion mass spectrometry (SIMS) depth profiling. Be outdiffuses significantly from these layers and, additionally, segregates in growth direction. Conversely, Be is depleted and incorporated only up to a solid-solubility limit depending on the Al content. SPSLs with shorter period are disordered and show the solid-solubility limits of ho… Show more

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Cited by 8 publications
(3 citation statements)
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“…However, p-GaP is lattice-mismatched for AlGaAs materials used mainly for reflective 850 nm IR-LEDs. Furthermore, Be in Au/Be is not useful for AlGaAs-based quantum wells due to its high likelihood to be diffused to the active region [ 18 , 19 ].…”
Section: Resultsmentioning
confidence: 99%
“…However, p-GaP is lattice-mismatched for AlGaAs materials used mainly for reflective 850 nm IR-LEDs. Furthermore, Be in Au/Be is not useful for AlGaAs-based quantum wells due to its high likelihood to be diffused to the active region [ 18 , 19 ].…”
Section: Resultsmentioning
confidence: 99%
“…This can be because the bond between Ga and P is stronger than that between Ga and As . With the increase of P in the NW, it is more difficult for Be atom to be incorporated as it needs to overcome higher energy barriers . Therefore, the Be accumulation inside the Ga droplet is faster for NWs grown with higher P content, especially under high doping flux.…”
mentioning
confidence: 99%
“…Experimentally, thermally activated redistribution of impurities through semiconductor heterointerfaces, i.e., interfacial segregation, has been investigated for Si=SiGe heterostructures, where the equilibrium concentrations of dopants in Si and in SiGe layers differ by a factor of 2 -3 [4][5][6][7]. This effect is stronger in III-V heterostructures [8,9], where concentration differences may reach 2 orders of magnitude and affect the luminescence efficiency of light-emitting diodes [10]. At this point, however, fundamental understanding of segregation is still lacking, and only a phenomenological theory of segregation exists [11].…”
mentioning
confidence: 99%