“…[29] reported similar results for doped ceria when the number of oxygen vacancies increased due to replacement of Ce with different rare earth elements. 200) planes in the cubic fluorite structure are known as a plane with the lowest surface energy and fastest out-of-plan growth [30,31], respectively. Adopting of the 80 W for applied radio frequency power provides high enough mobility in sputtered particles, and according to the proposed mechanism for film growth by Mahieu et al [32], it is categorized in zone T deposition.…”