materials in the same footprint, while still deliver good power densities as a result of short Li + diffusion paths. [1,2] In order to realize 3D microbatteries, there is a great need for thin film deposition techniques that can precisely produce thin film electrode and electrolyte materials on high-aspect-ratio substrates. Recently, atomic layer deposition (ALD) appears as a powerful technique for depositing uniform and conformal thin films on such high-aspect-ratio substrates. [3] ALD is based on sequential exposure of gaseous precursors on the target substrates where saturated surface reactions allow deposition of high-quality thin films in a layerby-layer manner, and the film thickness is controlled in submonolayer accuracy. [4,5] These advantages of ALD promise it great potential for the fabrication of 3D all-solidstate microbatteries. To achieve this ultimate goal, it is essential to develop ALD processes specifically for battery active materials, including the anode, cathode, and solid-state electrolyte.During the past few years, great progresses have been made to produce these electrochemically active materials by ALD for lithium-ion battery (LIB) applications. [6][7][8][9] On one hand, the anode materials that can be synthesized by ALD have been extended from metal oxides (such as TiO 2 , SnO 2 ) to metal sulfides (such as GaS x ). [9,10] Meanwhile, several glass-type solid-state electrolytes, i.e., LiTaO 3 , [11] Li 3 PO 4 , [12,13] Li x Al y Si z O, [14] and LiPON, [15,16] have been deposited via ALD by using a sub-cycle strategy, and exhibited ionic conductivities of ≈10 −9 -10 −7 S cm −1 at room temperature (RT). Lithium-containing cathode materials (LiCoO 2 , LiMnO 2 , and LiFePO 4 ) [17][18][19] have also been synthesized using ALD, by carefully designing the surface chemistry employed. More recently, an organic lithium anode, Li-terephthalate, has also been successfully made by using Li(thd) and terephthalic acid as precursors and pairing ALD with molecular layer deposition. [20] With these ALD-deposited electrode materials in place, the next key step toward 3D microbatteries would be the integration of these active materials onto 3D structures to build 3D microelectrodes, which is yet to be demonstrated. Besides LIBs, sodium-ion batteries (SIBs) are recently attracting increasing attention as a low-cost energy storage system. [21][22][23] Similarly, development of 3D electrode 3D microbatteries hold great promise as on-board energy supply systems for microelectronic devices. The construction of 3D microbatteries relies on the development of film deposition techniques that can enable coatings of uniform electrode and electrolyte materials in high-aspect-ratio substrates. Here, a 3D FePO 4 on carbon nanotubes (CNTs@FePO 4 ) structure is fabricated by coating FePO 4 on CNTs/carbon paper substrate using atomic layer deposition. Compared to FePO 4 on a planar substrate, the 3D CNTs@FePO 4 electrode exhibits significantly increased areal capacity and excellent rate capability for lithium-ion and sodium...