Sol-Gel-Based Integrated Optical Microring Resonator Humidity Sensor

Bhola, Bipin; Nosovitskiy, P.; Mahalingam, Hari; Steier, William H.

doi:10.1109/jsen.2009.2020113

Cited by 42 publications

(25 citation statements)

References 36 publications

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“…For example, a humidity sensor based on a hydrophilic coating of SiO 2 nanoparticles has recently been reported [260], as too has ethanol vapor detection using a porous ZnO coating [261]. Polymers and sol-gels represent a more ubiquitous choice of coating, however, with sensing of water vapor [173,262], isopropanol [263], ammonia [264], ethanol [265,266], and hexane vapor [266] having been demonstrated. Due to the variation of chemical susceptibility between differing polymers, and hence the differing magnitudes of associated swelling and/or refractive index changes, chemical discrimination is possible in polymer-based gas sensors by use of multiplexed sensors [266].…”

Section: Sensingmentioning

confidence: 99%

Whispering gallery mode sensors

2015

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We present a comprehensive overview of sensor technology exploiting optical whispering gallery mode (WGM) resonances. After a short introduction we begin by detailing the fundamental principles and theory of WGMs in optical microcavities and the transduction mechanisms frequently employed for sensing purposes. Key recent theoretical contributions to the modeling and analysis of WGM systems are highlighted. Subsequently we review the state of the art of WGM sensors by outlining efforts made to date to improve current detection limits. Proposals in this vein are numerous and range, for example, from plasmonic enhancements and active cavities to hybrid optomechanical sensors, which are already working in the shot noise limited regime. In parallel to furthering WGM sensitivity, efforts to improve the time resolution are beginning to emerge. We therefore summarize the techniques being pursued in this vein. Ultimately WGM sensors aim for real-world applications, such as measurements of force and temperature, or alternatively gas and biosensing. Each such application is thus reviewed in turn, and important achievements are discussed. Finally, we adopt a more forward-looking perspective and discuss the outlook of WGM sensors within both a physical and biological context and consider how they may yet push the detection envelope further.

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Section: Sensingmentioning

confidence: 99%

Whispering gallery mode sensors

2015

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“…With the advantages of compact structure, low cost, easy integration, good resistance, the optical micro-ring resonator [1][2] have important applications in the sensor fields. In 2009, Bipin Bhola [3] proposed a optical micro-ring resonator humidity sensor made of sol-gel, the sensitivity is 16pm/10%RH. In 2011, Yu Wu et al [4] analyzed sensing properties of the single fiber micro-ring humidity sensor consisting of PMMA, and their analysis indicated that the relative humidity is 17-98% RH and the sensitivity can achieve 88pm/10%RH, which reflects the characteristics of good reproducibility and rapid detection.…”

Section: Introductionmentioning

confidence: 99%

Study of a sensor based on the series of micro-rings with dual coupling points

Guo

Piao

et al. 2015

SPIE Proceedings

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A novel type of humidity sensor based on the series of micro-rings with the same radius is proposed, and the humidity is measured by detecting the spectrum drift. Experimental results show the sensitivity can achieve about 16pm/10%RH and the sensing range of the humidity sensor is 10~60%RH. The proposed structure will provide an effective way for integrated humidity sensors with simple structure, high sensitivity and low cost.

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“…A wide range of sensor types have been studied and developed with various materials including polymers, semiconductors, and porous ceramics to monitor the humidity levels. For instance, capacitive, resistive, and optical sensors detect humidity levels due to change in the dielectric constant of a polymer and/or metal oxide thin film, in electrical impedance of a hygroscopic medium, and in optical signal of polymers or microporous silicones, respectively [3], [4]. Recently, graphene oxide humidity sensors were also reported which show high sensitivity and fast response [5], [6].…”

Section: Introductionmentioning

confidence: 99%

ZnO Nanorod-Based Humidity Sensors With Fast Response

Jung

2014

IEEE Electron Device Lett.

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Humidity sensors based on ZnO nanorods (NRs) have been developed using a Wheatstone bride (WB) configuration, where the ZnO NRs were selectively grown onto the one quadrant of the WB circuit. It turns out that the WB-based sensor possesses superior performances in terms of response and recovery time, and thermal stability in comparison with conventional types of resistive sensors. Thus, the WB sensor exhibits a fast response and recovery time (∼1 s), and temperature-invariant behaviors over a broad range of temperatures up to 180°C, which is likely because of the self-calibrating and error correction capabilities of the WB circuit itself.Index Terms-Wheatstone bridge, zinc oxide, nanorods, humidity sensor.

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Sol-Gel-Based Integrated Optical Microring Resonator Humidity Sensor

Cited by 42 publications

References 36 publications

Whispering gallery mode sensors

Whispering gallery mode sensors

Study of a sensor based on the series of micro-rings with dual coupling points

ZnO Nanorod-Based Humidity Sensors With Fast Response

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