Soft-switching technique applicable to capacitive load for resonant inverter of plasma generator

Itakura, Koji; Kakemizu, Hiroaki; Nakaido, Hiroki; Umetani, Kazuhiro; Hiraki, Eiji; Ikenari, Tatsuya

doi:10.1109/iecon.2017.8216264

Cited by 5 publications

(2 citation statements)

References 15 publications

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“…As a method of high output power to a high resistance load with a low drain-source voltage in the kHz-frequency applications, inserting a step-up transformer between the series resonator and the load has been studied [14]- [19]. Nonetheless, in the MHz-frequency application, power-loss due to high-frequency large excitation current in the transformer [21] and high-frequency large current in the series resonator increase.…”

Section: Conventional Half-bridge Series Resonant Invertermentioning

confidence: 99%

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13.56MHz Half-Bridge GaN-HEMT Resonant Inverter Achieving High Power, Low Distortion, and High Efficiency by ‘L-S Network’

Oyane

Thilak

Masuda

et al. 2022

IEICE Trans. Electron.

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This paper proposes a topology of high power, MHzfrequency, half-bridge resonant inverter ideal for low-loss Gallium Nitride high electron mobility transistor (GaN-HEMT). General GaN-HEMTs have drawback of low drain-source breakdown voltage. This property has prevented conventional high-frequency series resonant inverters from delivering high power to high resistance loads such as 50Ω, which is typically used in radio frequency (RF) systems. High resistance load causes hardswitching also and reduction of power efficiency. The proposed topology overcomes these difficulties by utilizing a proposed 'L-S network'. This network is effective combination of a simple impedance converter and a series resonator. The proposed topology provides not only high power for high resistance load but also arbitrary design of output wattage depending on impedance conversion design. In addition, the current through the series resonator is low in the L-S network. Hence, this series resonator can be designed specifically for harmonic suppression with relatively high quality-factor and zero reactance. Low-distortion sinusoidal 3kW output is verified in the proposed inverter at 13.56MHz by computer simulations. Further, 99.4% high efficiency is achieved in the power circuit in 471W experimental prototype.

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Section: Conventional Half-bridge Series Resonant Invertermentioning

confidence: 99%

“…Half-bridge and full-bridge series resonant inverters [9] have been prominent solutions for generating various ranges of power with relatively low frequency [10]- [19]. These inverters have the advantages of low loss zero voltage switching (ZVS) and drain-source voltage stability against load fluctuations [20].…”

Section: Introductionmentioning

confidence: 99%