Soft piezoresistive cantilevers for adhesion force measurements

Kwoka, Krzysztof; Orłowska, Karolina; Majstrzyk, Wojciech; Sierakowski, Andrzej; Janus, P.; Tomaszewski, D.; Grabiec, P.; Piasecki, Tomasz; Gotszalk, Teodor

doi:10.1016/j.sna.2019.111747

Cited by 8 publications

(4 citation statements)

References 24 publications

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“…The size reduction of the cantilever will provide a better flow sensing device, which is attainable with MEMS technology. In addition, the cantilever in this study is fabricated using a 5-μm-thick Si membrane, and further thinning of the cantilever is easily attainable, for example to a several hundreds of nm-thick cantilever [ 30 , 33 , 34 , 35 , 36 , 37 , 38 , 39 ]. Since the force sensitivity of the cantilever type force sensor will improve with the cube of the thickness, a further reduction of the measurable flow rate will be possible.…”

Section: Water Flow Measurementmentioning

confidence: 99%

Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever

et al. 2020

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In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form of a thin cantilever, the temperature environment of the dummy sensor is almost identical to that of the sensing cantilever. The temperature compensation effect was measured, and the piezoresistive cantilever was combined with a gasket jig to enable the direct implementation of the piezoresistive cantilever in a flow tube. The sensor device stably measured flow rates from 20 μL/s to 400 μL/s in a silicon tube with a 2-mm inner diameter without being disturbed by temperature fluctuations.

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Section: Water Flow Measurementmentioning

confidence: 99%

Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever

et al. 2020

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“…The impact of these parasitic signals on the measured sensor output can then be estimated and adjusted using this replica. Compared to the prior method [16,18,19], the current approach essentially helps to isolate the genuine signal of interest from the unwanted effects of parasitic variables, resulting in more practical, precise, and dependable measurement (or sensing) performance without the need for modifications to the resonator device used.…”

Section: Introductionmentioning

confidence: 99%

Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors

Setiono,

Nelfyenny,

Nyang’au

et al. 2024

Sensors

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Electrothermal piezoresistive resonant cantilever sensors have been fabricated with embedded actuating (heating resistor) and sensing (piezo resistors) parts, with the latter configured in a Wheatstone bridge circuit. Due to the close spacing between these two elements, a direct thermal parasitic effect on the resonant sensor during the actuating-sensing process leads to asymmetric amplitude and reversing phase spectral responses. Such a condition affects the precise determination of the cantilever’s resonant frequency, f0. Moreover, in the context of phase-locked loop-based (PLL) resonance tracking, a reversing phase spectral response hinders the resonance locking due to its ambiguity. In this work, a replica of the baseline spectral was applied to remove the thermal parasitic effect on the resonance spectra of the cantilever sensor, and its capability was simulated through mathematical analysis. This replica spectral was subtracted from the parasitized spectral using a particular calculation, resulting in optimized spectral responses. An assessment using cigarette smoke particles performed a desired spectral shifting into symmetrical amplitude shapes and monotonic phase transitions, subsequently allowing for real-time PLL-based frequency tracking.

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“…The sensing mechanisms of existed * Author to whom any correspondence should be addressed. tactile sensors mainly contain capacitance [11][12][13], resistance [14,15], piezoelectricity [16,17], optics [18,19], magnetism [20], pneumatic pressure [21,22], and triboelectricity [23][24][25]. Among the above mechanisms, the tactile sensors based on optics have the advantages of simple structure, fast response, high sensitivity, immunity of electromagnetic interference, and low power consumption, and thus have been one of attracting research interests in the domain of tactile perception [26].…”

Section: Introductionmentioning

confidence: 99%

A liquid lens-based optical sensor for tactile sensing

Yang¹,

Fu²,

Cao³

et al. 2022

Smart Mater. Struct.

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Tactile sensing plays a crucial role in robot manipulation, robot interaction, and health monitoring. Because of high sensitivity, simple structure, and superior interference immunity, optical tactile sensors based on optical imaging or optical conduction have been one of the most active research. Herein, a novel liquid lens-based optical sensor (LLOS) is presented. Different with existed optical tactile sensors, the main body of the proposed sensor belongs to a variable-focus optical lens with a liquid-membrane structure, and its focal length is changed with the contact force, thereby changing the propagation direction of light and affecting the perceived light intensity of the photosensitive element. By conducting some testing experiments, the LLOS demonstrates fast response (about 0.021s), stable dynamic response characteristics, and good linearity (R-squared is about 0.99), repeated measurement accuracy(<0.006V), and measurement accuracy (< 0.2N). Hence, the LLOS provides a new and promising method to measure tactile and has potential application in robotics nondestructive grasping and interactive input devices.

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Soft piezoresistive cantilevers for adhesion force measurements

Cited by 8 publications

References 24 publications

Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever

Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever

Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors

A liquid lens-based optical sensor for tactile sensing

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