Soft mold NanoImprint Lithography: A versatile tool for sub-wavelength grating applications

Pelloquin, Sylvain; Augé, Sylvain; Sharshavina, Ksenia; Doucet, Jean‐Baptiste; Héliot, A.; Camon, Henri; Gauthier-Lafaye, Olivier

doi:10.1109/dtip.2017.7984454

Cited by 6 publications

(5 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The GMRF is fabricated by soft-mold nano-imprint lithography, as reported in [49] on a 4 inch wafer. First, a multilayer stack is deposited by inductively-coupled-plasma plasmaenhanced chemical vapor deposition (ICP-PECVD) on a glass substrate.…”

Section: Laser Designmentioning

confidence: 99%

See 1 more Smart Citation

Guided-mode resonance filter extended-cavity diode laser

Guillemot

Oksenhendler²,

Pelloquin

et al. 2020

Laser Phys.

View full text Add to dashboard Cite

We characterize a semiconductor external cavity diode laser whose optical feedback is provided by a guided mode resonance filter (GMRF). We focus on the spectral properties. The wavelength of operation falls in the telecom range (1506 nm). The GMRF acting both as a wavelength intracavity filter and feedback mirror allows for a compact laser design. The single-mode operation is verified in a wide range of driving currents. We finely tune the cavity length to adjust the frequency by 14 GHz without mode-hops in agreement with the expected free-spectral range of the resonator ∼20 GHz. The compactness of the cavity allows fast frequency sweeps when modulating the current (90 MHz/mA at 100 kHz, the modulation bandwidth). The frequency noise (366 kHz whitenoise contribution) is also analysed to evaluate the potential of our design for high-resolution applications.

show abstract

Section: Laser Designmentioning

confidence: 99%

“…Eventually, the wafer is diced into 5 × 5 mm 2 individual filters. Under normal incidence, the GMRF exhibits a 85% reflectivity peak at 1506 nm with a FWHM of 1.8 nm (see [49] for a detailed description of the fabrication process and the final structure).…”

Section: Laser Designmentioning

confidence: 99%

Guided-mode resonance filter extended-cavity diode laser

Guillemot

Oksenhendler²,

Pelloquin

et al. 2020

Laser Phys.

View full text Add to dashboard Cite

show abstract

“…The first layer of the waveguide upper-cladding layer, made of Si 3 N 4 , was deposited using an Inductive-Coupled-Plasma Plasma-Enhanced Chemical Vapor Deposition system. The designed gratings were subsequently patterned into this layer using nano-imprint lithography 12 and dry etching with the LiNbO 3 top surface acting as an etch-stop interface. The device fabrication was completed by the deposition of a 323-nm-thick SiO 2 upper cladding layer on top of the grating structure and of a 266-nm-thick SiO 2 single-layer anti-reflective coating on the rear-side of the substrate to avoid back-reflection.…”

Section: Fabricationmentioning

confidence: 99%

Frequency doubling in cavity-resonator integrated grating filter

Renaud

Gauthier-Lafaye

Monmayrant

et al. 2020

High Contrast Metastructures IX

View full text Add to dashboard Cite

Guided Mode Resonant Filters (GMRFs) have long been studied as a support surface for nonlinear optical interactions due to their intrinsically high Q-factor. However, their operation relies on a non-localized and large-area guided mode that limits the achievable power density and requires complex phase-matching approaches. Conversely, photonic crystal nano-cavities have shown promising results due to both their high-Q factors to enhance the pump field and their localized nature that allows phase-matching-free implementation and high power density excitation. However, their intrinsic small size restricts the supported input power and hinders the coupling efficiency of the pump into the mode. In this paper, we report the first experimental demonstration of continuous-wave second harmonic generation in a Cavity-Resonator Integrated Grating Filter (CRIGF). This intermediary device, which can be described as a cavityenhanced finite-size GMRF or, equivalently, as a low-index-contrast photonic crystal micro-cavity, will be shown to offer a practical route to nonlinear interactions with viable power (<20 mW) and excitation conditions (surface excitation with a ~10-µm-waist spot size). In practice, the devices under study make use of a lithium-niobate on insulator (LNOI) waveguide with a nanostructured silicon nitride upper cladding as a pragmatic way to implement a high second-order nonlinearity platform with established processing technology. The already-demonstrated versatility of the CRIGF design (demonstrated at wavelengths of 850 nm using S 3 iN 4 /SiO 2 platform, 4.5 µm with the GaAs/AlGaAs technology and, here, at 1.55 µm with the LiNbO 3 platform) coupled to the electro-optical tuning afforded by lithium niobate system makes this approach extremely promising for pixelated non-linear systems.

show abstract

“… For periods inferior to 1µm, nanoimprint lithography (NIL) was carried out. A home-made resin (NILUV, (Doucet et al 2016)) is used for soft mold NIL process (Pelloquin et al 2018).…”

Section: Materials and Implementationmentioning

confidence: 99%

Characterization of liquid crystals impregnated micrometric diffraction gratings for an active near-IR light extraction control

et al. 2020

Self Cite

View full text Add to dashboard Cite

Due to their narrow reflection peak as well as their compact structure, Guided Mode Resonance Filters (GMRFs) are attractive for many applications. We demonstrate the possibility to modulate the properties of a GMRF by associating it with liquid crystals (LCs). By impregnating the diffraction grating with LCs, it is possible to switch between an active and an inactive state depending on the polarization of the light or the applied voltage. In this paper we fabricated and characterized the first diffraction order of LCimpregnated gratings with different periods (0,8 to 5,0µm) and depths (130 to 840nm) to test the ability of liquid crystals to adjust the diffraction properties. Finally, around 99.8% of diffraction intensity turns off with a 90° rotation polarization at zero voltage and 90 to 99% by applying a voltage of 30V according to the grating dimensions. The effect of the grating dimension on the diffraction modulation capacity are discussed.

show abstract

Soft mold NanoImprint Lithography: A versatile tool for sub-wavelength grating applications

Cited by 6 publications

References 7 publications

Guided-mode resonance filter extended-cavity diode laser

Guided-mode resonance filter extended-cavity diode laser

Frequency doubling in cavity-resonator integrated grating filter

Characterization of liquid crystals impregnated micrometric diffraction gratings for an active near-IR light extraction control

Contact Info

Product

Resources

About