Effect of the lattice deformation on soft magnetic properties were examined for the Fe based sputtered films with large magnetocrystalline anisotropy and linear magnetostriction constants. Furthermore, correlations among the film magnetostriction, induced anisotropy and soft magnetic properties are also discussed. Residual lattice strain induces the additional magnetoelastic energy in one grain, and which has a strong correlation to soft magnetic properties through the change of local anisotropy fluctuation, especially for the films of b.c.c. crystal structure. Experimental results suggest that film magnetostriction plays an important role in magnetization process indirectly through the change of macroscopically induced magnetic anisotropy.