2011
DOI: 10.1007/s00542-011-1273-3
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Soft lithography replication based on PDMS partial curing

Abstract: In this paper, a partial curing technique is presented. Its aim is to enable the soft lithography replication process for the case requiring usage of PDMS mold. Through controlling the curing time during molding step, the liquid PDMS prepolymer in original status, which will later constitute the device substrate, can be partially polymerized as well as solidified. As a result, not only can the structural pattern in the mold be successfully transferred into the device layer, but also the spontaneous adhesive in… Show more

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Cited by 11 publications
(1 citation statement)
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“…The second step in the fabrication process is the casting of the reusable PDMS MM. PDMS/PDMS double casting has been previously demonstrated in the literature [14,23,24]. However, for successful demolding, these studies require surface treatment using various chemicals [12,14,15,25,26].…”
Section: Fabrication Of the Reusable Male Moldmentioning
confidence: 99%
“…The second step in the fabrication process is the casting of the reusable PDMS MM. PDMS/PDMS double casting has been previously demonstrated in the literature [14,23,24]. However, for successful demolding, these studies require surface treatment using various chemicals [12,14,15,25,26].…”
Section: Fabrication Of the Reusable Male Moldmentioning
confidence: 99%