Soft lithography of microfluidics channels using SU-8 mould on glass substrate for low cost fabrication

Ayoib, A.; Hashim, U.; Arshad, M. K. Md; Thivina, V.

doi:10.1109/iecbes.2016.7843447

Cited by 12 publications

(5 citation statements)

References 15 publications

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“…Following SU-8 master template fabrication, PDMS was molded onto it using the soft lithography technique, which is considered the fastest and most cost-effective method since a fully cleanroom environment is not necessary [15], [16]. Prior to molding, the SU-8 master template was cleaned with isopropyl alcohol and rinsed with purified water to remove contaminants from the surface.…”

Section: Fabrication Of Microfluidics Microchannels Using Pdms Biopol...mentioning

confidence: 99%

“…The master template can be utilized indefinitely as long as the SU-8 remains intact on the substrate [14]. Subsequently, the master template was replicated using PDMS through the cost-effective soft lithography technique, which does not require a fully cleanroom environment [15], [16]. After channel formation, they were sealed using plasma bonding treatment.…”

Section: Introductionmentioning

confidence: 99%

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Cost-Effective Fabrication of Polydimethylsiloxane (PDMS) Microfluidics for Point-of-Care Application

Adilah Ayoib,

Noor Amalina Aini Abdul Karim,

Uda Hashim

et al. 2024

IJNeaM

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Microfluidics fabrication pertains to the construction of small-scale devices and systems that manipulate and control small volumes of fluids. This process involves precise engineering and manufacturing procedures aimed at designing and producing these devices, which find applications in healthcare, environmental monitoring, and chemical analysis. The present study showcases an inexpensive approach to fabricate microfluidics channels using PDMS biopolymer and soft lithography technique to achieve laminar fluid flow. Initially, a robust and adhesive mold was created by fabricating a master template using several layers of SU-8 5 and SU-8 2015 negative photoresists. Subsequently, PDMS microfluidics channels were replicated and sealed onto a glass substrate through plasma bonding treatment. High-power microscopy images and profilometer analyses demonstrated successful fabrication with minimal deviation from the initial designs and the fabricated devices (less than 0.07 mm, less than 0.6°). Both the SU-8 master template and PDMS replicate displayed average microchannel height values and surface roughness of 100 μm and 0.26 μm or lower, respectively. Additionally, the fluid test confirmed laminar flow without any leakage post plasma oxidation, indicating the completion of an efficient and cost-effective fabrication process.

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Section: Fabrication Of Microfluidics Microchannels Using Pdms Biopol...mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Cost-Effective Fabrication of Polydimethylsiloxane (PDMS) Microfluidics for Point-of-Care Application

Adilah Ayoib,

Noor Amalina Aini Abdul Karim,

Uda Hashim

et al. 2024

IJNeaM

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“…By following the protocol previously discussed and described in table 1, it is remarkable the opportunity to polymerize master mask molds by DLW using a low absorption wavelength (λ = 532 nm). Although there exist many reported works about the polymerization of photo-sensible polymers through different techniques, such as multiphoton absorption [49] or UV-Lithography [50], this protocol represents a very easy and low-cost method of fabrication, improving the polymerization sizes by controlling the focused beam position [31,32].…”

Section: Master Mask Fabrication By Dlw Protocolmentioning

confidence: 99%

Microfluidic system manufacturing by direct laser writing for the generation and characterization of microdroplets

Álvarez-Martínez¹,

Medina-Cázares²,

Alcaraz³

et al. 2022

J. Micromech. Microeng.

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This work contributes to the development of microfluidics devices in a simpler way and by keeping the cost of microfabrication as low as possible. Implementing methods to develop microfluidic devices and to have control over the channel size rapidly and easily have become a challenge. In the present work, direct laser writing (DLW) is proposed as a manufacturing technique to develop a T-junction microfluidic droplet generator operating in the squeezing regime. Owing to the channel size, DLW depends on both the focused laser spot properties and the interface material refractive indices. The Debye-Wolf theory behind this technique predicts the focal shift of the laser spot to avoid optical misalignment during the fabrication process. The Debye-Wolf theory and the COMSOL ray-tracing module are presented as complementary design tools. The flow rates and the channel sizes were investigated under the two-phase COMSOL module. Experimental droplet generation results were assisted with the solution of the Navier-Stokes equation with appropriate boundary conditions. Microdroplet size characterization, as well as simulations, show a linear tendency with the flow rate ratios (FRR). For FRR ranging from 0.25 to 2, droplet lengths from ∼ 320μm to ∼ 1050μm were observed. This information is confirmed by implementing a digital image processing protocol. The dynamics of droplets formation, strongly influenced by the input flow rate fluctuations caused by the syringes and micropump operation, are presented. This protocol aims the full control of these devices to perform potential applications, such as particle insulators, drug delivery, fluidic microlasers, among others.

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“…Complex micro-structures have received special interest in photonics [1][2][3], integrated optics [4] and nano-technology [5,6] because of the high capability to manipulate light at the micro-and sub-micrometer length scales. It has been demonstrated that polymer-based micro-structures can work as resonator cavities [7,8], integrated interferometers [9], cantilevers [10,11], molds for simple and complex micro-fluidics masks and so on [12,13]. All these important micro-structures present extraordinary advantages on photonics, biochemical sensing and plasmonic applications.…”

Section: Introductionmentioning

confidence: 99%

Implementation and assessment of a low-cost 3D laser platform controlled by open software for printing polymeric micro-structures

Camarena-Chávez

Castro-Beltrán

Medina

et al. 2020

J. Micromech. Microeng.

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A low-cost 3D opto-mechatronic platform controlled by free-source software with optical and mechanical resolutions of 120 m and 10 m, respectively, was developed to fabricate micro-pedestals in grid presentation and diffractive optical elements such as micro-square and micro-slits. Direct laser writing (DLW) and low-one photon absorption (LOPA) were employed as the fabrication protocol and the physical phenomena involved in the platform control and development of the micrometric structures. A laser pointer, one of the lowest-cost lasers in the market, centered at 532 nm with an intensity of 65 mW, was used to polymerize the SU8-2050 photoresist through the DLW procedures. The printing process was carried out by using 5X and 10X microscope objectives with numerical apertures of 0.13 and 0.25, respectively. The point spread function demonstrated the geometrical variations and the field intensity distribution about the focal plane, where the Debye–Wolf approximation is valid, which were used for comparison purposes. In addition, ray tracing simulations were presented to demonstrate how light interacts with the SU8-film and how out of focus condition plays a fundamental role in the final size of the printed micro-pattern. Finally, two optical diffractive elements and their diffraction patterns in the Fraunhofer regime were presented.

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Soft lithography of microfluidics channels using SU-8 mould on glass substrate for low cost fabrication

Cited by 12 publications

References 15 publications

Cost-Effective Fabrication of Polydimethylsiloxane (PDMS) Microfluidics for Point-of-Care Application

Cost-Effective Fabrication of Polydimethylsiloxane (PDMS) Microfluidics for Point-of-Care Application

Microfluidic system manufacturing by direct laser writing for the generation and characterization of microdroplets

Implementation and assessment of a low-cost 3D laser platform controlled by open software for printing polymeric micro-structures

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